Abstract: The invention relates to a method for operating a mechanical resonator in an electronic oscillator, comprising determining a state space description of the resonator, in which state variables are the mass, the stiffness or dimensions of components used in the crystal resonator; providing a table with frequency correction factors as a function of a state space of a resonator; finding a frequency correction factor corresponding to the determined state space; and multiplying the output frequency of the resonator with the correction factor, and to an electronic oscillator, comprising a mechanical resonator, wherein an output frequency of the oscillator is multiplied by a frequency correction factor, the frequency correction factor being obtained from determination of the state variables of the resonator, in particular dominant mechanical state variables.

Abstract: The invention relates to a method for operating a mechanical resonator in an electronic oscillator, comprising determining a state space description of the resonator, in which state variables are the mass, the stiffness or dimensions of components used in the crystal resonator; providing a table with frequency correction factors as a function of a state space of a resonator; finding a frequency correction factor corresponding to the determined state space; and multiplying the output frequency of the resonator with the correction factor, and to an electronic oscillator, comprising a mechanical resonator, wherein an output frequency of the oscillator is multiplied by a frequency correction factor, the frequency correction factor being obtained from determination of the state variables of the resonator, in particular dominant mechanical state variables.

Abstract: An electronic oscillator circuit has a first oscillator, for supplying a first oscillation signal, a second oscillator, for supplying a second oscillation signal, a first controller for delivering the first control signal as a function of a phase difference between a first controller input and a second controller input of the first controller; a second controller for delivering the second control signal as a function of a phase difference between a first controller input of the second controller and a second controller input of the second controller; a resonator; at least a second resonance frequency, with a first phase shift dependent on the difference between the frequency of a second exciting signal and the second resonance frequency and processing means, for receiving the first oscillator signal and the second oscillator signal, determining their mutual proportion, looking up a frequency compensation factor in a prestored table and outputting a compensated oscillation signal.

Abstract: An electronic oscillator circuit has a first oscillator, for supplying a first oscillation signal, a second oscillator, for supplying a second oscillation signal, a first controller for delivering the first control signal as a function of a phase difference between a first controller input and a second controller input of the first controller; a second controller for delivering the second control signal as a function of a phase difference between a first controller input of the second controller and a second controller input of the second controller; a resonator; at least a second resonance frequency, with a first phase shift dependent on the difference between the frequency of a second exciting signal and the second resonance frequency and processing means, for receiving the first oscillator signal and the second oscillator signal, determining their mutual proportion, looking up a frequency compensation factor in a prestored table and outputting a compensated oscillation signal.

Abstract: A system and method allow for a more effective and efficient patterning device architecture and control arrangement. A lithography apparatus comprises an illumination system, a patterning device, and a projection system. The illumination system is configured to condition a beam of radiation. The patterning device is configured to pattern the beam of radiation. The patterning device comprises a control system and an array of individually controllable elements. The control system is configured to convert analog signals having respective first voltage values to corresponding differential control signals having second, higher voltage values. Corresponding ones of the individually controllable elements in the array of individually controllable elements are configured to actuate based on receiving a corresponding one of the differential control signals. The projection system is configured to project the patterned beam onto a target area of a substrate.