Patents by Inventor Antonius Theodorus Anna Derksen

Antonius Theodorus Anna Derksen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Publication number: 20050018156
    Abstract: The pressure and/or height of liquid in a liquid reservoir of an immersion lithography apparatus is obtained by a measurement device. The pressure and/or height can be used to determine the height and/or tilt of the substrate.
    Type: Application
    Filed: June 23, 2004
    Publication date: January 27, 2005
    Applicant: ASML Netherlands B.V.
    Inventors: Johannes Catharinus Mulkens, Antonius Theodorus Anna Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer, Bob Streefkerk