Patents by Inventor Antony K. Jan

Antony K. Jan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SELF-ASSEMBLED MONOLAYER DEPOSITION FROM LOW VAPOR PRESSURE ORGANIC MOLECULES
    Publication number: 20210375600
    Abstract: The present disclosure generally relates to a substrate processing chamber, a substrate processing apparatus, and a substrate processing method for self-assembled monolayer (SAM) deposition of low vapor pressure organic molecules (OM) followed by further substrate processing, such as atomic layer deposition.
    Type: Application
    Filed: May 28, 2021
    Publication date: December 2, 2021
    Inventors: Qiwei Liang, Srinivas D. Nemani, Keith Tatseun Wong, Antony K. Jan