Patents by Inventor Antti RAUTIAINEN

Antti RAUTIAINEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TEMPERATURE-STABLE MEMS RESONATOR
    Publication number: 20240339985
    Abstract: A MEMS (microelectromechanical system) resonator (150) comprising a substrate (105), a resonator element (100), and a cavity (110). The resonator element (100) is separated from the substrate (105) by said cavity (110), and the resonator element (100) comprises a layer of single-crystalline silicon (101). The layer of single-crystalline silicon (101) is doped with phosphorus atoms to obtain a specific doping profile.
    Type: Application
    Filed: September 1, 2022
    Publication date: October 10, 2024
    Inventors: Ville SAARELA, Matias PERTTILÄ, Antti JAAKKOLA, Aarne OJA, Panu KOPPINEN, Antti RAUTIAINEN