Patents by Inventor Anu AUSTIN

Anu AUSTIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240137711
    Abstract: A capacitive transducer or microphone includes a first substrate of one or more layers and which includes a first surface, a first cavity in the first surface, and a mesa diaphragm that spans the first cavity. The capacitive transducer or microphone includes a second substrate fixed to the first substrate. The second substrate has one or more layers which includes a second cavity having a nonplanar (e.g., contoured or structured or stepped) bottom surface that faces the mesa diaphragm. A shape or relief of the bottom surface of the cavity may advantageously be, to at least some degree, complementary to a deformed shape of the diaphragm. The second substrate may include one or more acoustic holes, non-uniformly distributed thereacross. One or more vents may vent the second cavity.
    Type: Application
    Filed: January 2, 2024
    Publication date: April 25, 2024
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Boon Wah Soh, Jane Jiaying Soh
  • Patent number: 11902741
    Abstract: A capacitive transducer or microphone includes a first substrate of one or more layers and which includes a first surface, a first cavity in the first surface, and a mesa diaphragm that spans the first cavity. The capacitive transducer or microphone includes a second substrate fixed to the first substrate. The second substrate has one or more layers which includes a second cavity having a nonplanar (e.g., contoured or structured or stepped) bottom surface that faces the mesa diaphragm. A shape or relief of the bottom surface of the cavity may advantageously be, to at least some degree, complementary to a deformed shape of the diaphragm. The second substrate may include one or more acoustic holes, non-uniformly distributed thereacross. One or more vents may vent the second cavity.
    Type: Grant
    Filed: October 31, 2022
    Date of Patent: February 13, 2024
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Boon Wah Soh, Jane Jiaying Soh
  • Publication number: 20230054811
    Abstract: A capacitive transducer or microphone includes a first substrate of one or more layers and which includes a first surface, a first cavity in the first surface, and a mesa diaphragm that spans the first cavity. The capacitive transducer or microphone includes a second substrate fixed to the first substrate. The second substrate has one or more layers which includes a second cavity having a nonplanar (e.g., contoured or structured or stepped) bottom surface that faces the mesa diaphragm. A shape or relief of the bottom surface of the cavity may advantageously be, to at least some degree, complementary to a deformed shape of the diaphragm. The second substrate may include one or more acoustic holes, non-uniformly distributed thereacross. One or more vents may vent the second cavity.
    Type: Application
    Filed: October 31, 2022
    Publication date: February 23, 2023
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Boon Wah Soh, Jane Jiaying Soh
  • Patent number: 11523224
    Abstract: A capacitive transducer or microphone includes a first substrate of one or more layers and which includes a first surface, a first cavity in the first surface, and a mesa diaphragm that spans the first cavity. The capacitive transducer or microphone includes a second substrate fixed to the first substrate. The second substrate has one or more layers which includes a second cavity having a nonplanar (e.g., contoured or structured or stepped) bottom surface that faces the mesa diaphragm. A shape or relief of the bottom surface of the cavity may advantageously be, to at least some degree, complementary to a deformed shape of the diaphragm. The second substrate may include one or more acoustic holes, non-uniformly distributed thereacross. One or more vents may vent the second cavity.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: December 6, 2022
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Boon Wah Soh, Jane Jiaying Soh
  • Publication number: 20220212920
    Abstract: Aspects of the disclosure provide a waterproof packaging technique for fabricating waterproof microphones in mobile devices. A device based on the waterproof packaging technique can include a microelectromechanical system (MEMS) device, a housing enclosing the MEMS device, and a liquid-resistant air inlet passive device (LRAPD) on the housing. The LRAPD can include at least one channel connecting an exterior of the housing with a chamber formed between the housing and the MEMS device. An inside surface of the channel can be coated with a liquid-repellant coating. In some examples, the liquid-repellant coating can be a self-assembled monolayer (SAM) coating.
    Type: Application
    Filed: March 22, 2022
    Publication date: July 7, 2022
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag
  • Patent number: 11312620
    Abstract: Aspects of the disclosure provide a waterproof packaging technique for fabricating waterproof microphones in mobile devices. A device based on the waterproof packaging technique can include a microelectromechanical system (MEMS) device, a housing enclosing the MEMS device, and a liquid-resistant air inlet passive device (LRAPD) on the housing. The LRAPD can include at least one channel connecting an exterior of the housing with a chamber formed between the housing and the MEMS device. An inside surface of the channel can be coated with a liquid-repellant coating. In some examples, the liquid-repellant coating can be a self-assembled monolayer (SAM) coating.
    Type: Grant
    Filed: December 31, 2019
    Date of Patent: April 26, 2022
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag
  • Patent number: 11193843
    Abstract: Aspects of the disclosure provide a capacitive pressure sensor. The capacitive pressure sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. A second cavity is formed between the movable plate and the second surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. The second substrate further includes a third cavity between a surface of the fixed plate opposite to the movable plate and a surface of the second substrate opposite to the first substrate.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: December 7, 2021
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Dieter Naegele-Preissmann
  • Patent number: 11156519
    Abstract: Aspects of the disclosure provide a capacitive pressure sensor. The sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. A second cavity is formed between the movable plate and the second surface.
    Type: Grant
    Filed: October 24, 2019
    Date of Patent: October 26, 2021
    Assignee: Innogrity Pte Ltd
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Dieter Naegele-Preissmann
  • Publication number: 20210266679
    Abstract: A capacitive transducer or microphone includes a first substrate of one or more layers and which includes a first surface, a first cavity in the first surface, and a mesa diaphragm that spans the first cavity. The capacitive transducer or microphone includes a second substrate fixed to the first substrate. The second substrate has one or more layers which includes a second cavity having a nonplanar (e.g., contoured or structured or stepped) bottom surface that faces the mesa diaphragm. A shape or relief of the bottom surface of the cavity may advantageously be, to at least some degree, complementary to a deformed shape of the diaphragm. The second substrate may include one or more acoustic holes, non-uniformly distributed thereacross. One or more vents may vent the second cavity.
    Type: Application
    Filed: February 21, 2020
    Publication date: August 26, 2021
    Inventors: KATHIRGAMASUNDARAM SOORIAKUMAR, Anu AUSTIN, Ian Rose BIHAG, Boon Wah SOH, Jane Jiaying SOH
  • Patent number: 11095998
    Abstract: An acoustic apparatus includes an anchored diaphragm that is actuated by mechanical energy and a transduction material that is disposed in the anchored diaphragm that generates the mechanical energy that actuates the anchored diaphragm. The acoustic apparatus further includes an extendable diaphragm that is actuated when the anchored diaphragm is actuated and a plurality of damping holes that are disposed about the extendable diaphragm and that allow the extendable diaphragm to actuate in a vertical direction.
    Type: Grant
    Filed: May 2, 2019
    Date of Patent: August 17, 2021
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag
  • Patent number: 11059716
    Abstract: Aspects of the disclosure provide a packaging technique for making a directional microphone which employs mechanical structures to cancel undesired background noise to realize the directional function instead of an extra sensor required in electronic noise-cancelling techniques, thus reducing footprint and cost of a directional microphone. A directional microphone based on this technique can include an acoustic sensor and a housing enclosing the acoustic sensor. The acoustic sensor can include a sensing diaphragm, a cavity below the sensing diaphragm, and a first substrate. The directional microphone device can further include a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity. The housing can include a cover attached to a second substrate supporting the first substrate. The cover can include a first opening over the sensing diaphragm and a second opening at a side of the cover.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: July 13, 2021
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag
  • Publication number: 20200249110
    Abstract: Aspects of the disclosure provide a capacitive pressure sensor. The capacitive pressure sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. A second cavity is formed between the movable plate and the second surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. The second substrate further includes a third cavity between a surface of the fixed plate opposite to the movable plate and a surface of the second substrate opposite to the first substrate.
    Type: Application
    Filed: April 9, 2020
    Publication date: August 6, 2020
    Inventors: Kathirgamasundaram SOORIAKUMAR, Anu AUSTIN, Ian Rose BIHAG, Dieter NAEGELE-PREISSMANN
  • Patent number: 10648879
    Abstract: Aspects of the disclosure provide a capacitive pressure sensor. The capacitive pressure sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. A second cavity is formed between the movable plate and the second surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. The second substrate further includes a third cavity between a surface of the fixed plate opposite to the movable plate and a surface of the second substrate opposite to the first substrate.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: May 12, 2020
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Dieter Naegele-Preissmann
  • Publication number: 20200131029
    Abstract: Aspects of the disclosure provide a waterproof packaging technique for fabricating waterproof microphones in mobile devices. A device based on the waterproof packaging technique can include a microelectromechanical system (MEMS) device, a housing enclosing the MEMS device, and a liquid-resistant air inlet passive device (LRAPD) on the housing. The LRAPD can include at least one channel connecting an exterior of the housing with a chamber formed between the housing and the MEMS device. An inside surface of the channel can be coated with a liquid-repellant coating. In some examples, the liquid-repellant coating can be a self-assembled monolayer (SAM) coating.
    Type: Application
    Filed: December 31, 2019
    Publication date: April 30, 2020
    Inventors: Kathirgamasundaram SOORIAKUMAR, Anu AUSTIN, Ian Rose BIHAG
  • Publication number: 20200071159
    Abstract: Aspects of the disclosure provide a packaging technique for making a directional microphone which employs mechanical structures to cancel undesired background noise to realize the directional function instead of an extra sensor required in electronic noise-cancelling techniques, thus reducing footprint and cost of a directional microphone. A directional microphone based on this technique can include an acoustic sensor and a housing enclosing the acoustic sensor. The acoustic sensor can include a sensing diaphragm, a cavity below the sensing diaphragm, and a first substrate. The directional microphone device can further include a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity. The housing can include a cover attached to a second substrate supporting the first substrate. The cover can include a first opening over the sensing diaphragm and a second opening at a side of the cover.
    Type: Application
    Filed: November 11, 2019
    Publication date: March 5, 2020
    Inventors: Kathirgamasundaram SOORIAKUMAR, Anu AUSTIN, Ian Rose BIHAG
  • Publication number: 20200056953
    Abstract: Aspects of the disclosure provide a capacitive pressure sensor. The sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. A second cavity is formed between the movable plate and the second surface.
    Type: Application
    Filed: October 24, 2019
    Publication date: February 20, 2020
    Inventors: Kathirgamasundaram SOORIAKUMAR, Anu AUSTIN, Ian Rose BIHAG, Dieter NAEGELE-PREISSMANN
  • Patent number: 10562761
    Abstract: Aspects of the disclosure provide a waterproof packaging technique for fabricating waterproof microphones in mobile devices. A device based on the waterproof packaging technique can include a microelectromechanical system (MEMS) device, a housing enclosing the MEMS device, and a liquid-resistant air inlet passive device (LRAPD) on the housing. The LRAPD can include at least one channel connecting an exterior of the housing with a chamber formed between the housing and the MEMS device. An inside surface of the channel can be coated with a liquid-repellant coating. In some examples, the liquid-repellant coating can be a self-assembled monolayer (SAM) coating.
    Type: Grant
    Filed: November 17, 2016
    Date of Patent: February 18, 2020
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag
  • Patent number: 10508024
    Abstract: Aspect of the disclosure provide a packaging technique for making a directional microphone which employs mechanical structures to cancel undesired background noise to realize the directional function instead of an extra sensor required in electronic noise-cancelling techniques, thus reducing footprint and cost of a directional microphone. A directional microphone based on this technique can include an acoustic sensor and a housing enclosing the acoustic sensor. The acoustic sensor can include a sensing diaphragm, a cavity below the sensing diaphragm, and a first substrate. The directional microphone device can further include a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity. The housing can include a cover attached to a second substrate supporting the first substrate. The cover can include a first opening over the sensing diaphragm and a second opening at a side of the cover.
    Type: Grant
    Filed: August 22, 2018
    Date of Patent: December 17, 2019
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag
  • Patent number: 10488288
    Abstract: Aspects of the disclosure provide a capacitive pressure sensor. The sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. A second cavity is formed between the movable plate and the second surface.
    Type: Grant
    Filed: February 22, 2017
    Date of Patent: November 26, 2019
    Inventors: Kathirgamasundaram Sooriakumar, Anu Austin, Ian Rose Bihag, Dieter Naegele-Preissmann
  • Publication number: 20190261110
    Abstract: An acoustic apparatus includes an anchored diaphragm that is actuated by mechanical energy and a transduction material that is disposed in the anchored diaphragm that generates the mechanical energy that actuates the anchored diaphragm. The acoustic apparatus further includes an extendable diaphragm that is actuated when the anchored diaphragm is actuated and a plurality of damping holes that are disposed about the extendable diaphragm and that allow the extendable diaphragm to actuate in a vertical direction.
    Type: Application
    Filed: May 2, 2019
    Publication date: August 22, 2019
    Inventors: Kathirgamasundaram SOORIAKUMAR, Anu AUSTIN, Ian Rose BIHAG