Patents by Inventor Anup Patel
Anup Patel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250247651Abstract: MEMS device and manufacturing method therefor. The device includes a base; a diaphragm including an upper part and a lower part, a receiving space being formed therebetween; a counter electrode located in the receiving space; and support members located between the two parts, spaced apart from one another and from the counter electrode, two ends of each support member being connected to the two parts, respectively. The diaphragm includes a first zone and a second zone. In the first zone, a surface of the upper part is covered with a first electrode, a surface of the lower part is covered with a second electrode opposite to the first electrode. In the second zone, a surface of the upper part and a surface of the lower part are each covered with a reinforcement layer. The reinforcement layer in the second zone enhances the mechanical strength and robustness of the diaphragm.Type: ApplicationFiled: January 30, 2024Publication date: July 31, 2025Inventors: Chun Pheng Tan, Anup Patel, Kahkeen Lai, Rui Zhang
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Publication number: 20250223154Abstract: A microelectromechanical system includes counter electrodes, a first diaphragm and a second diaphragm. The first diaphragm is provided with multiple first corrugations, each first corrugation includes a first crest and a first trough, and the first crests and troughs are arranged alternately in a third direction. The second diaphragm is provided with multiple second corrugations, each second corrugation includes a second crest and a second trough, and the second crests and troughs are arranged alternately in the third direction. The first crests are respectively aligned with the second troughs to form cavities, and the counter electrodes are disposed in the cavities respectively. The first troughs are respectively aligned with the second crests, and at least some of the first troughs are configured to be in direct contact with corresponding second crests. The system has an improved robustness while the high acoustic compliance and sensitivity from the sealed dual-diaphragm are maintained.Type: ApplicationFiled: January 4, 2024Publication date: July 10, 2025Inventors: Scott Lyall Cargill, Yannick Pierre Kervran, Anup Patel, Euan James Boyd
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Publication number: 20240300806Abstract: An MEMS diaphragm and an MEMS sensor. The MEMS diaphragm includes: a main diaphragm including a main body sensing portion and beam portions, and the beam portions are connected to an outer edge of the main body sensing portion; an additional material layer provided on the beam portions or provided on both an edge of the main body sensing portion and on the beam portions. The intrinsic tensile stress of the additional material layer is greater than an intrinsic tensile stress of the main body sensing portion. An additional material layer is provided, which mechanically reinforces the diaphragm region experiencing high stress during a pressure pulse, and the intrinsic tensile stress of the additional material layer is greater than the main body sensing portion, thereby ensuring the compliance of the main diaphragm.Type: ApplicationFiled: March 6, 2023Publication date: September 12, 2024Inventors: Anup Patel, Scott Lyall Cargill, Euan James Boyd
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Patent number: 12028679Abstract: Provided is an electrostatic clutch. The electrostatic clutch includes: multiple arrays of HIN electrodes, a respective pass-through channel being formed between any two arrays of the multiple arrays of HIN electrodes; and multiple arrays of biased electrodes, each array of the multiple arrays of biased electrodes moving back and forth in the respective pass-through channel such that electrostatic force is generated between the multiple arrays of biased electrodes and the multiple arrays of HIN electrodes. Such configuration allows microphone performance over a wide range of atmospheric pressures which is likely expected by applications. This is achieved electrostatically in a purely passive way having advantages over other designs which require complex electronics and active control. Physically decoupling the membrane and sense structure simplifies design of the sense structure as only small AC perturbations of the rotor is considered with no DC changes in rotor position.Type: GrantFiled: June 28, 2022Date of Patent: July 2, 2024Assignee: AAC Acoustic Technologies (Shenzhen) Co., Ltd.Inventors: Anup Patel, Euan James Boyd, Yannick Pierre Kervran
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Patent number: 11950054Abstract: Provided is a MEMS condenser microphone, including a base plate, a spacer and a membrane. The membrane is supported above the base plate by the spacer. The base plate, the spacer, and the membrane enclose a vacuum cavity. An end of the membrane close to the vacuum cavity is connected, by means of a connecting rod, to an electrostatic clutch. The electrostatic clutch is connected to a capacitive sensing structure. The microphone has the advantage of allowing microphone performance over a wide range of atmospheric pressures which is likely expected by customers. This is achieved electrostatically in a purely passive way which has an advantage over other designs which require complex electronics and active control. Physically decoupling the membrane and sense structure simplifies the design of the sense structure as only small AC perturbations of the rotor need to be considered with no DC changes in rotor position.Type: GrantFiled: June 28, 2022Date of Patent: April 2, 2024Assignee: AAC Acoustic Technologies (Shenzhen) Co., Ltd.Inventors: Anup Patel, Euan James Boyd, Yannick Pierre Kervran
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Publication number: 20230421968Abstract: Provided is an electrostatic clutch. The electrostatic clutch includes: multiple arrays of HIN electrodes, a respective pass-through channel being formed between any two arrays of the multiple arrays of HIN electrodes; and multiple arrays of biased electrodes, each array of the multiple arrays of biased electrodes moving back and forth in the respective pass-through channel such that electrostatic force is generated between the multiple arrays of biased electrodes and the multiple arrays of HIN electrodes. Such configuration allows microphone performance over a wide range of atmospheric pressures which is likely expected by applications. This is achieved electrostatically in a purely passive way having advantages over other designs which require complex electronics and active control. Physically decoupling the membrane and sense structure simplifies design of the sense structure as only small AC perturbations of the rotor is considered with no DC changes in rotor position.Type: ApplicationFiled: June 28, 2022Publication date: December 28, 2023Inventors: Anup Patel, Euan James Boyd, Yannick Pierre Kervran
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Publication number: 20230421969Abstract: Provided is a MEMS condenser microphone, including a base plate, a spacer and a membrane. The membrane is supported above the base plate by the spacer. The base plate, the spacer, and the membrane enclose a vacuum cavity. An end of the membrane close to the vacuum cavity is connected, by means of a connecting rod, to an electrostatic clutch. The electrostatic clutch is connected to a capacitive sensing structure. The microphone has the advantage of allowing microphone performance over a wide range of atmospheric pressures which is likely expected by customers. This is achieved electrostatically in a purely passive way which has an advantage over other designs which require complex electronics and active control. Physically decoupling the membrane and sense structure simplifies the design of the sense structure as only small AC perturbations of the rotor need to be considered with no DC changes in rotor position.Type: ApplicationFiled: June 28, 2022Publication date: December 28, 2023Inventors: Anup Patel, Euan James Boyd, Yannick Pierre Kervran
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Patent number: 11750973Abstract: A microelectromechanical system includes an enclosure defining a cavity and an opening communicating with the cavity; a membrane mounted at the opening; a cantilever located within the cavity, the at least one cantilever comprising a first end, a second end and a fulcrum located between the first end and the second end; a plunger positioned between the membrane and the cantilever and configured to transfer displacement of the membrane to the first end of the cantilever; and a sensing member connected to the second end of the cantilever. The distance between the first end and the fulcrum is less than that between the second end and the fulcrum. The microelectromechanical system has the advantages of high SNR, small package size and high sensitivity. The membrane has a stiffness order of magnitude higher than a conventional membrane, which avoids mechanical collapse and large DC deformation under 1 atm.Type: GrantFiled: February 5, 2021Date of Patent: September 5, 2023Assignee: AAC Acoustic Technologies (Shenzhen) Co., Ltd.Inventors: Anup Patel, Euan James Boyd, Scott Lyall Cargill
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Patent number: 11743634Abstract: An MEMS microphone includes a substrate including a back volume provided inside the substrate and an opening provided at an upper surface of the substrate to communicate the back volume; a sensing device provided at an inner side wall of the back volume; a first cantilever provided inside the back volume and including end portions coupling with the sensing device; a first membrane provided at the opening; a second membrane provided inside the back volume; and second cantilevers, each of which includes a first end mechanically supporting the first cantilever, and a second end connected to the second membrane. By suspending the first cantilever on the second cantilevers, the end portions of the first cantilever always couple with a preset position of the sensing device. Thus, the DC offset of the displacement of the membrane can be prevented.Type: GrantFiled: May 20, 2021Date of Patent: August 29, 2023Assignee: AAC Acoustic Technologies (Shenzhen) Co., Ltd.Inventors: Euan James Boyd, Anup Patel, Colin Wei Hong Chung
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Patent number: 11677337Abstract: A comb drive for MEMS device includes a stator and a rotor displaceable relative to the stator in a first direction. The stator includes stator comb fingers and the rotor includes rotor comb fingers. The stator comb fingers are coupled to two high impedance nodes to form high impedance node domains arranged in the first direction. The rotor comb fingers are coupled to two oppositely biased electrodes to form oppositely biased domains. Pairs of capacitors with opposite acoustic polarity are respectively formed between the high impedance node domains and the oppositely biased domains. The comb drive of the present invention has increased electrostatic sensitivity for a given unit cell cross-sectional area whilst maintaining an acceptable capacitance and linearity of voltage signal vs displacement. Extra force shim unit cells may be used, which allows for the stiffness between the rotor and stator to be controlled and reduced to zero for a particular displacement range, without impacting sensitivity.Type: GrantFiled: August 13, 2021Date of Patent: June 13, 2023Assignee: AAC Acoustic Technologies (Shenzhen) Co., Ltd.Inventors: Anup Patel, Yannick Pierre Kervran, Euan James Boyd
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Publication number: 20230047220Abstract: A comb drive for MEMS device includes a stator and a rotor displaceable relative to the stator in a first direction. The stator includes stator comb fingers and the rotor includes rotor comb fingers. The stator comb fingers are coupled to two high impedance nodes to form high impedance node domains arranged in the first direction. The rotor comb fingers are coupled to two oppositely biased electrodes to form oppositely biased domains. Pairs of capacitors with opposite acoustic polarity are respectively formed between the high impedance node domains and the oppositely biased domains. The comb drive of the present invention has increased electrostatic sensitivity for a given unit cell cross-sectional area whilst maintaining an acceptable capacitance and linearity of voltage signal vs displacement. Extra force shim unit cells may be used, which allows for the stiffness between the rotor and stator to be controlled and reduced to zero for a particular displacement range, without impacting sensitivity.Type: ApplicationFiled: August 13, 2021Publication date: February 16, 2023Inventors: Anup Patel, Yannick Pierre Kervran, Euan James Boyd
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Publication number: 20220377453Abstract: An MEMS microphone includes a substrate including a back volume provided inside the substrate and an opening provided at an upper surface of the substrate to communicate the back volume; a sensing device provided at an inner side wall of the back volume; a first cantilever provided inside the back volume and including end portions coupling with the sensing device; a first membrane provided at the opening; a second membrane provided inside the back volume; and second cantilevers, each of which includes a first end mechanically supporting the first cantilever, and a second end connected to the second membrane. By suspending the first cantilever on the second cantilevers, the end portions of the first cantilever always couple with a preset position of the sensing device. Thus, the DC offset of the displacement of the membrane can be prevented.Type: ApplicationFiled: May 20, 2021Publication date: November 24, 2022Inventors: Euan James Boyd, Anup Patel, Colin Wei Hong Chung
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Publication number: 20220256284Abstract: A microelectromechanical system includes an enclosure defining a cavity and an opening communicating with the cavity; a membrane mounted at the opening; a cantilever located within the cavity, the at least one cantilever comprising a first end, a second end and a fulcrum located between the first end and the second end; a plunger positioned between the membrane and the cantilever and configured to transfer displacement of the membrane to the first end of the cantilever; and a sensing member connected to the second end of the cantilever. The distance between the first end and the fulcrum is less than that between the second end and the fulcrum. The microelectromechanical system has the advantages of high SNR, small package size and high sensitivity. The membrane has a stiffness order of magnitude higher than a conventional membrane, which avoids mechanical collapse and large DC deformation under 1 atm.Type: ApplicationFiled: February 5, 2021Publication date: August 11, 2022Inventors: Anup Patel, Euan James Boyd, Scott Lyall Cargill
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Patent number: 6780151Abstract: A flexible ureteropyeloscope having a control section and a shaft extending from the control section. The shaft has a front end with a first active deflection section connected in series with a second active deflection section. The control section is adapted to independently deflect the first and second defection sections. The first and second active deflection sections are adapted to deflect such that a distal end of the ureteropyeloscope can be placed in a calyx of a lower pole of a kidney without the need to passively deflect the front end of the shaft against kidney tissue of a patient to reach the calyx of the lower pole.Type: GrantFiled: March 1, 2002Date of Patent: August 24, 2004Assignee: ACMI CorporationInventors: Edward A. Grabover, Gregory S. Konstorum, Demetrius H. Bagley, Jr., Michael J. Conlin, Anup Patel, Peter Gerard Schulam
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Publication number: 20030023142Abstract: A flexible ureteropyeloscope having a control section and a shaft extending from the control section. The shaft has a front end with a first active deflection section connected in series with a second active deflection section. The control section is adapted to independently deflect the first and second defection sections. The first and second active deflection sections are adapted to deflect such that a distal end of the ureteropyeloscope can be placed in a calyx of a lower pole of a kidney without the need to passively deflect the front end of the shaft against kidney tissue of a patient to reach the calyx of the lower pole.Type: ApplicationFiled: March 1, 2002Publication date: January 30, 2003Inventors: Edward A. Grabover, Gregory S. Konstorum, Demetrius H. Bagley, Michael J. Conlin, Anup Patel, Peter Gerard Schulam
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Patent number: RE41475Abstract: A flexible ureteropyeloscope having a control section and a shaft extending from the control section. The shaft has a front end with a first active deflection section connected in series with a second active deflection section. The control section is adapted to independently deflect the first and second defection sections. The first and second active deflection sections are adapted to deflect such that a distal end of the ureteropyeloscope can be placed in a calyx of a lower pole of a kidney without the need to passively deflect the front end of the shaft against kidney tissue of a patient to reach the calyx of the lower pole.Type: GrantFiled: July 19, 2005Date of Patent: August 3, 2010Assignee: Gyrus ACMI, Inc.Inventors: Edward A. Grabover, Gregory S. Konstorum, Demetrius H. Bagley, Jr., Michael J. Conlin, Anup Patel, Peter Gerard Schulam