Abstract: An algorithm-driven digital ultraviolet (UV) lithography (DUL) method and apparatus used to fabricate high-quality optical waveguide and many other kinds of high-resolution microstructures without the use of a photomask. Instead of the use of an actual photomask, a virtual mask based on a spatial light modulator is used. The DUL method and apparatus can compensate for a proximity effect caused by light scattering and make the exposure adaptive to a nonlinear response curve of a photoresist, in which an exposure dose-map is created based on the bitmap of a designed pattern together with the optimization parameters determined by system configuration and the photoresist. To fabricate large-area patterns, a plurality of sliced exposure dose-submaps with transition zones that can depress the stitching error caused by mechanical mispositioning are generated for digital lithographic exposure process.

Abstract: A system and method for 3D microfabrication projects light capable of initiating photopolymerization toward a spatial light modulator that modulates light responsive to digital masks corresponding to layers of the structure. Projection optics focus the modulated light onto an optical plane within a photopolymerizable material supported on a stage. A computer controller causes the spatial light modulator to project a sequences of images corresponding to the digital masks while coordinating movement of the stage to move a position of the optical plane within the photopolymerizable material to sequentially project each image of the sequence to generate the structure by progressively photopolymerizing the photopolymerizable material.

Abstract: A system and method for 3D microfabrication projects light capable of initiating photopolymerization toward a spatial light modulator that modulates light responsive to digital masks corresponding to layers of the structure. Projection optics focus the modulated light onto an optical plane within a photopolymerizable material supported on a stage. A computer controller causes the spatial light modulator to project a sequence of images corresponding to the digital masks while coordinating movement of the stage to move a position of the optical plane within the photopolymerizable material to sequentially project each image of the sequence to generate the structure by progressively photopolymerizing the photopolymerizable material.

Abstract: A system and method for 3D microfabrication projects light capable of initiating photopolymerization toward a spatial light modulator that modulates light responsive to digital masks corresponding to layers of the structure. Projection optics focus the modulated light onto an optical plane within a photopolymerizable material supported on a stage. A computer controller causes the spatial light modulator to project a sequence of images corresponding to the digital masks while coordinating movement of the stage to move a position of the optical plane within the photopolymerizable material to sequentially project each image of the sequence to generate the structure by progressively photopolymerizing the photopolymerizable material.

Abstract: A sensor for measuring flow speed of a fluid, comprising: a light-absorbing optical fiber having a fiber Bragg grating inscribed in the fiber; wherein light is emitted into the light-absorbing optical fiber to heat the optical fiber and the fiber Bragg grating, and when the fluid passes over the sensor, the flow speed of the fluid is determined by the rate of heat loss from the sensor, and the temperature of the sensor is determined from the wavelength shift of the central wavelength of the fiber Bragg grating.

Abstract: A sensor for measuring flow speed of a fluid, comprising: a light-absorbing optical fiber having a fiber Bragg grating inscribed in the fiber; wherein light is emitted into the light-absorbing optical fiber to heat the optical fiber and the fiber Bragg grating, and when the fluid passes over the sensor, the flow speed of the fluid is determined by the rate of heat loss from the sensor, and the temperature of the sensor is determined from the wavelength shift of the central wavelength of the fiber Bragg grating.

Abstract: A pressure gauge includes a housing and a mechanical sensor placed in the housing for sensing change of the pressure. A characteristic of the sensor varies in correspondence to the change of the pressure. The gauge also includes an optical fiber, at least part of which is in the housing with a first end connected to the sensor such that a characteristic of the fiber varies in correspondence to the variance of the characteristic of the sensor, and an optical signal generator connected to a second end of the fiber for emitting an optical signal into the fiber. The second end of the fiber is distanced from the sensor, and the fiber generates at least a first reflected optical signal towards said second end, which first reflected optical signal contains information relating to the variance of the characteristic of the fiber.

Abstract: A pressure gauge includes a housing and a mechanical sensor placed in the housing for sensing change of the pressure. A characteristic of the sensor varies in correspondence to the change of the pressure. The gauge also includes an optical fiber, at least part of which is in the housing with a first end connected to the sensor such that a characteristic of the fiber varies in correspondence to the variance of the characteristic of the sensor, and an optical signal generator connected to a second end of the fiber for emitting an optical signal into the fiber. The second end of the fiber is distanced from the sensor, and the fiber generates at least a first reflected optical signal towards said second end, which first reflected optical signal contains information relating to the variance of the characteristic of the fiber.