Patents by Inventor Apoorva Upadhyay

Apoorva Upadhyay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition of tellurium-containing thin films
    Patent number: 11408068
    Abstract: Methods for depositing tellurium-containing films on a substrate are described. The substrate is exposed to a tellurium precursor and a reactant to form the tellurium-containing film (e.g., elemental tellurium, tellurium oxide, tellurium carbide, tellurium silicide, germanium telluride, antimony telluride, germanium antimony telluride). The exposures can be sequential or simultaneous.
    Type: Grant
    Filed: February 1, 2021
    Date of Patent: August 9, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Thomas Knisley, Keenan N. Woods, Mark Saly, Charles H. Winter, Apoorva Upadhyay
  • DEPOSITION OF TELLURIUM-CONTAINING THIN FILMS
    Publication number: 20210262084
    Abstract: Methods for depositing tellurium-containing films on a substrate are described. The substrate is exposed to a tellurium precursor and a reactant to form the tellurium-containing film (e.g., elemental tellurium, tellurium oxide, tellurium carbide, tellurium silicide, germanium telluride, antimony telluride, germanium antimony telluride). The exposures can be sequential or simultaneous.
    Type: Application
    Filed: February 1, 2021
    Publication date: August 26, 2021
    Applicants: Applied Materials, Inc., Wayne State University
    Inventors: Thomas Knisley, Keenan N. Woods, Mark Saly, Charles H. Winter, Apoorva Upadhyay