Abstract: The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and aligrnent for use in a final quadrupole mass spectrometer device.

Abstract: The present invention provides a quadrupole mass spectrometer and an ion filter for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

Abstract: The present invention provides an improved electron ionizer for use in a quadrupole mass spectrometer. The improved electron ionizer includes a repeller plate that ejects sample atoms or molecules, an ionizer chamber, a cathode that emits an electron beam into the ionizer chamber, an exit opening for excess electrons to escape, at least one shim plate to collimate said electron beam, extraction apertures, and a plurality of lens elements for focusing the extracted ions onto entrance apertures.

Abstract: The present invention provides a quadrupole mass spectrometer and an ion filter, or pole array, for use in the quadrupole mass spectrometer. The ion filter includes a thin patterned layer including a two-dimensional array of poles forming one or more quadrupoles. The patterned layer design permits the use of very short poles and with a very dense spacing of the poles, so that the ion filter may be made very small. Also provided is a method for making the ion filter and the quadrupole mass spectrometer. The method involves forming the patterned layer of the ion filter in such a way that as the poles of the patterned layer are formed, they have the relative positioning and alignment for use in a final quadrupole mass spectrometer device.

Abstract: A rotating field mass and velocity analyzer having a cell with four walls, time dependent RF potentials that are applied to each wall, and a detector. The time dependent RF potentials create an RF field in the cell which effectively rotates within the cell. An ion beam is accelerated into the cell and the rotating RF field disperses the incident ion beam according to the mass-to-charge (m/e) ratio and velocity distribution present in the ion beam. The ions of the beam either collide with the ion detector or deflect away from the ion detector, depending on the m/e, RF amplitude, and RF frequency. The detector counts the incident ions to determine the m/e and velocity distribution in the ion beam.

Abstract: The present invention provides a minature quadrupole mass spectrometer array for the separation of ions, comprising a first pair of parallel, planar, nonmagnetic conducting rods each having an axis of symmetry, a second pair of planar, nonmagnetic conducting rods each having an axis of symmetry parallel to said first pair of rods and disposed such that a line perpendicular to each of said first axes of symmetry and a line perpendicular to each of said second axes of symmetry bisect each other and form a generally 90 degree angle.

Abstract: Trace levels of molecular oxygen are measured by introducing a gas containing the molecular oxygen into a target zone, and impacting the molecular oxygen in the target zone with electrons at the O.sup.- resonant energy level for dissociative electron attachment to produce O.sup.- ions. Preferably, the electrons have an energy of about 4 to about 10 eV. The amount of O.sup.- ions produced is measured, and is correlated with the molecular oxygen content in the target zone. The technique is effective for measuring levels of oxygen below 50 ppb, and even less than 1 ppb. The amount of O.sup.- can be measure in a quadrupole mass analyzer. Best results are obtained when the electrons have an energy of about 6 to about 8 eV, and preferably about 6.8 eV. The method can be used for other species by selecting the appropriate electron energy level.

Abstract: The present invention provides a minature quadrupole mass spectrometer array for the separation of ions, comprising a first pair of parallel, planar, nonmagnetic conducting rods each having an axis of symmetry, a second pair of planar, nonmagnetic conducting rods each having an axis of symmetry parallel to said first pair of rods and disposed such that a line perpendicular to each of said first axes of symmetry and a line perpendicular to each of said second axes of symmetry bisect each other and form a generally 90 degree angle.

Abstract: A reversal electron, high-current ionizer capable of focusing a beam of electrons to a reversal region employs an indirectly heated cathode having a concave emitting surface of width W<2r, where r is the radius of curvature and preferably a ratio of width to radius approximately equal to one for optimum high current for a given cathode width.

Abstract: A gridded electron reversal ionizer forms a three dimensional cloud of zero or near-zero energy electrons in a cavity within a filament structure surrounding a central electrode having holes through which the sample gas, at reduced pressure, enters an elongated reversal volume. The resultant negative ion stream is applied to a mass analyzer. The reduced electron and ion space-charge limitations of this configuration enhances detection sensitivity for material to be detected by electron attachment, such as narcotic and explosive vapors. Positive ions may be generated by generating electrons having a higher energy, sufficient to ionize the target gas and pulsing the grid negative to stop the electron flow and pulsing the extraction aperture positive to draw out the positive ions.

Abstract: An in-line reversal electron, high-current ionizer capable of focusing a beam of electrons to a reversal region and executing a reversal of said electrons, such that the electrons possess zero kinetic energy at the point of reversal, may be used to produce both negative and positive ions. A sample gas is introduced at the point of electron reversal for low energy electron-(sample gas) molecule attachment with high efficiency. The attachment process produces negative ions from the sample gas, which includes species present in trace (minute) amounts. These ions are extracted efficiently and directed to a mass analyzer where they may be detected and identified. The generation and detection of positive ions is accomplished in a similar fashion with minimal adjustment to potentials applied to the apparatus.

Abstract: A method of effecting modifications at the surfaces of materials using low energy ion beams of known quantum state, purity, flux and energy. The ion beam is obtained by bombarding ion-generating molecules with electrons which are also at low energy. The electrons used to bombard the ion generating molecules are separated from the ions thus obtained and the ion beam is directed at the material surface to be modified. Depending on the type of ion generating molecules used, different ions can be obtained for different types of surface modifications such as oxidation and diamond film formation.

Abstract: The method and apparatus of this invention provides a plurality of measurements indicative of the absolute cross section for excitation of an ion beam. The ion beam is merged for excitation by specific energies of electrons in an electron beam. Both beams are merged in an evacuated enclosure having a longitudinal magnetic field and a crossed uniform electric field. The ions and electrons interact over a known merged longitudinal length in a merged beam area. After collision, the electron and ion beams are demerged. Forward and backward-scattered electrons are collected and position-detected by a pair of microchannel plate arrays located at opposite ends of the longitudinal beam-merging area. A series of electron and ion primary current measurements are taken at full ion and electron beam strength. Measurements are also taken at greatly reduced beam strength to obtain a beam overlap profile.

Abstract: An electron gun is used with a mirror electrostatic field to produce zero or near zero velocity electrons by forming a turning point in their trajectories. A gas capable of attaching zero or near zero velocity is introduced at this turning point, and negative ions are produced by the attachment or dissociative attachment process. Operation may be continuous or pulsed. Ions thus formed are extracted by a simple lens system and suitable biasing of grids.

Abstract: A variable energy, high flux atomic oxygen source (10) comprising means (48) for producing a high density beam of molecules which will emit O.sup.- ions when bombarded with electrons; means (44) for producing a high current stream of electrons at a low energy level passing through the high density beam of molecules to produce a combined stream (54) of electrons and O.sup.- ions; means (32) for accelerating the combined stream to a desired energy level; means (12) for producing an intense magnetic field to confine the electrons and O.sup.- ions; means (56, 58) for directing a multiple pass laser beam (62) through the combined stream to strip off the excess electrons from a plurality of the O.sup.- ions to produce ground-state O atoms within the combined stream; electrostatic deflection means (68, 70) for deflecting the path of the O.sup.- ions and the electrons in the combined stream; and, means (78) for stopping the O.sup.

Abstract: A system for determining the stable energy levels of a species ion, of an atomic, molecular, or radical type, by application of ionizing energy of a predetermined level, such as through photoionization. The system adds a trapping gas to the gaseous species to provide a technique for detection of the energy levels. The electrons emitted from ionized species are captured by the trapping gas, only if the electrons have substantially zero kinetic energy. If the electrons have nearly zero energy, they are absorbed by the trapping gas to produce negative ions of the trapping gas that can be detected by a mass spectrometer. The applied energies (i.e. light frequencies) at which large quantities of trapping gas ions are detected, are the stable energy levels of the positive ion of the species. SF.sub.6 and CFCl.sub.3 have the narrowest acceptance bands, so that when they are used as the trapping gas, they bind electrons (to form negative ions) only when the electrons have very close to zero kinetic energy.