Abstract: The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional beam scanners. An embodiment in accordance with the present disclosure includes a housing that defines a sealed chamber that encloses a light source, a MEMS scanner having a scanning element for steering at least a portion of a light signal provided by the light source in two dimensions as an output signal, an optical element for collimating and/or redirecting the light signal, and a monitor photodiode for providing a local feedback signal based on the orientation of the scanning element. Preferably, the MEMS scanner and the monitor photodiode are monolithically integrated on the same substrate and the housing is configured as an electrostatic shield for the components located in the sealed chamber.

Abstract: The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional light scanners. An embodiment in accordance with the present disclosure includes a housing having a chamber for holding a light source and a MEMS scanner. The MEMS scanner receives light from the light source via an optical element disposed on a cover of the housing and steers an output signal along a propagation direction through the cover while steering the output signal in at least one dimension.

Abstract: The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional light scanners. An embodiment in accordance with the present disclosure includes a housing having a chamber for holding a light source and a MEMS scanner. The MEMS scanner receives light from the light source via an optical element disposed on a cover of the housing and steers an output signal along a propagation direction through the cover while steering the output signal in at least one dimension.

Abstract: The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional beam scanners. An embodiment in accordance with the present disclosure includes a light source and a MEMS-based scanning element for steering at least a portion of the light provided by the light source in at least one dimension as an output light signal, as well as one or more optical elements for collimating and/or redirecting light within a sealed chamber defined by the elements of a housing. In some embodiments, the one or more optical elements include a reflective lens that collimates the light provided by the light source while simultaneously correcting phase-front error imparted by the scanning element while steering the output beam.

Abstract: Aspects of the present disclosure describe an improved calibration method for systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) onto a surface of the eye and 2) detecting light reflected from features of the eye including corneal surface, pupil, iris—among others. Positional/geometric/feature/structural information pertaining to the eye is determined from timing information associated with the reflected light.

Abstract: Aspects of the present disclosure describe an improved calibration method for systems, methods, and structures that provide eye-tracking by 1) steering a beam of light through the effect of a microelectromechanical system (MEMS) onto a surface of the eye and 2) detecting light reflected from features of the eye including corneal surface, pupil, iris—among others. Positional/geometric/feature/structural information pertaining to the eye is determined from timing information associated with the reflected light.

Abstract: The present disclosure is directed to compact packaging for optical MEMS devices, such as one- and two-dimensional beam scanners. An embodiment in accordance with the present disclosure includes a light source and a MEMS-based scanning element for steering at least a portion of the light provided by the light source in at least one dimension as an output light signal, as well as one or more optical elements for collimating and/or redirecting light within a sealed chamber defined by the elements of a housing. In some embodiments, the one or more optical elements include a reflective lens that collimates the light provided by the light source while simultaneously correcting phase-front error imparted by the scanning element while steering the output beam.