Abstract: A planar positioning device having three degrees of freedom (X, Y, Rz) includes a static base having a flat bearing surface and a moveable stage. The stage is moveable over the bearing surface in an XY-plane. The moveable stage includes air bearings and is supported without contact by the bearing surface via said air bearings. The device includes a linear motor acting in the X-direction and a linear motor acting in the Y-direction, and at least one additional linear motor acting in the X-direction or in the Y-direction. Each of the linear motors includes a magnet assembly arranged on the moveable stage and a coil assembly arranged on the base. The base includes a slider track extending in the X-direction and a slider track extending in the Y-direction. The sliders each have a reluctance actuator arranged on it to cooperate with (ferro)magnetic material on the moveable stage.

Abstract: A planar positioning device having three degrees of freedom (X, Y, Rz) includes a static base having a flat bearing surface and a moveable stage. The stage is moveable over the bearing surface in an XY-plane. The moveable stage includes air bearings and is supported without contact by the bearing surface via said air bearings. The device includes a linear motor acting in the X-direction and a linear motor acting in the Y-direction, and at least one additional linear motor acting in the X-direction or in the Y-direction. Each of the linear motors includes a magnet assembly arranged on the moveable stage and a coil assembly arranged on the base. The base includes a slider track extending in the X-direction and a slider track extending in the Y-direction. The sliders each have a reluctance actuator arranged on it to cooperate with (ferro)magnetic material on the moveable stage.

Abstract: A positioning assembly is provided with an endless loop conveyor belt for transporting an object and a first and second roller (12) arranged inside the endless loop. A first mounting part connected to a first end of the first roller (12) and a second mounting part connected to a second end of the first roller (12) are independently movable in a length direction of the conveyor with respect to the frame (15). An actuator system is provided which includes a first lateral actuator (61) arranged to move at least a part of the first roller (12) in a direction parallel to the rotational axes (106) of the first roller (12). The first roller (12) is longitudinally divided into at least two longitudinal segments. The first lateral actuator (61) moves at least one of the longitudinal segments parallel to the rotational axis (106) of the first roller (12).

Abstract: A positioning assembly is provided with an endless loop conveyor belt for transporting an object and a first and second roller (12) arranged inside the endless loop. A first mounting part connected to a first end of the first roller (12) and a second mounting part connected to a second end of the first roller (12) are independently movable in a length direction of the conveyor with respect to the frame (15). An actuator system is provided which includes a first lateral actuator (61) arranged to move at least a part of the first roller (12) in a direction parallel to the rotational axes (106) of the first roller (12). The first roller (12) is longitudinally divided into at least two longitudinal segments. The first lateral actuator (61) moves at least one of the longitudinal segments parallel to the rotational axis (106) of the first roller (12).

Abstract: A linear motor for a laser beam recorder for mastering of optical media. The linear motor has a base and an actuator, the actuator being mounted to the base in a flexible way, such as via a leaf spring. The actuator may have a balance mass as a counter mass. The balance mass is preferably formed by an essential component of the linear motor.

Abstract: The invention relates to the control of an actuator system comprising an actuator and a load that is connected to the actuator by a drive chain comprising a compliant element. The load is positioned by controlling the actuator, which control of the actuator comprises at least the feeding of one or more reference signals to the actuator. To compensate for drive chain compliancy the invention proposes to generate a main reference signal component based on performance specifications of the system and to generate an additional reference signal component, which is adapted to compensate for predetermined jerks induced in the actuator system by the main reference component. The main reference signal and the additional reference signal are superimposed and fed to the actuator.