Patents by Inventor Arend KOOLMA

Arend KOOLMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid handling structure, immersion lithographic apparatus, and device manufacturing method
    Patent number: 10120290
    Abstract: A fluid handling structure, an immersion lithographic apparatus and a device manufacturing method are disclosed. In one arrangement, a fluid handling structure has a fluid extraction conduit with a recovery port configured to receive a used fluid into the conduit. A plurality of flow breakers are provided that each extends across at least a portion of the conduit. The flow breakers are positioned downstream of the recovery port. The flow breakers are arranged so that a common plane cuts through at least a portion of two or more of the flow breakers. The common plane is aligned so as to be perpendicular to the average direction of flow in the conduit at the position of the common plane.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: November 6, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Daan Daniel Johannes Antonius Van Sommeren, Bruno Jean François Frackowiak, Arend Koolma
  • FLUID HANDLING STRUCTURE, IMMERSION LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
    Publication number: 20170176867
    Abstract: A fluid handling structure, an immersion lithographic apparatus and a device manufacturing method are disclosed. In one arrangement, a fluid handling structure has a fluid extraction conduit with a recovery port configured to receive a used fluid into the conduit. A plurality of flow breakers are provided that each extends across at least a portion of the conduit. The flow breakers are positioned downstream of the recovery port. The flow breakers are arranged so that a common plane cuts through at least a portion of two or more of the flow breakers. The common plane is aligned so as to be perpendicular to the average direction of flow in the conduit at the position of the common plane.
    Type: Application
    Filed: June 18, 2015
    Publication date: June 22, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Daan Daniel Johannes Antonius VAN SOMMEREN, Bruno Jean François FRACKOWIAK, Arend KOOLMA