Abstract: A method for operating a particle beam microscope comprises scanning an object using a particle beam and detecting electrons and x-ray radiation when scanning an object using a particle beam. Improved x-ray radiation information can be generated by combining weighted x-ray radiation information items according to the formula S e ( r ? "\[Rule]" i ) = ? j w ? ( i , j ) · S ? ( r ? "\[Rule]" j ) , wherein S({right arrow over (r)}i) is the detected x-ray radiation intensity assigned to a location {right arrow over (r)}i. The following holds true for the weights, for example: w ? ( i , j ) = e - ( r ? "\[Rule]" i - r ? "\[Rule]" j ) 2 / ? f 2 · e - ( I ? ( r ? "\[Rule]" i ) - I ? ( r ? "\[Rule]" j ) ) 2 / ? g 2 , wherein I({right arrow over (r)}) represents the intensity of the detected electrons that is assigned to the location {right arrow over (r)}, and ?f and ?g are constants.

Abstract: A control system for frequency control of a laser module, comprising at least one laser module for generating laser radiation, at least one control device coupled or configured to couple to the laser module, and at least one optical resonator coupled or configured to couple to the control device, wherein the control device comprises a semiconductor substrate, a first Pound-Drever-Hall system arranged on the semiconductor substrate and at least one second Pound-Drever-Hall system arranged on the semiconductor substrate, wherein the laser module is coupled to the first Pound-Drever-Hall system of the control device and is configured to couple to the at least second Pound-Drever-Hall system of the control device, wherein the first Pound-Drever-Hall system is coupled to the optical resonator and wherein the second Pound-Drever-Hall system is configured to couple to the optical resonator, and wherein the number of Pound-Drever-Hall systems is greater than the number of laser modules or optical resonators.