Patents by Inventor Arie Jefrey DEN BOEF

Arie Jefrey DEN BOEF has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DETECTION APPARATUS FOR SIMULTANEOUS ACQUISITION OF MULTIPLE DIVERSE IMAGES OF AN OBJECT
    Publication number: 20220172347
    Abstract: Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.
    Type: Application
    Filed: April 2, 2020
    Publication date: June 2, 2022
    Applicant: ASML Netherlands B.V.
    Inventors: Teunis Willem TUKKER, Arie Jefrey DEN BOEF, Nitesh PANDEY, Marinus Petrus REIJNDERS, Ferry ZIJP