Patents by Inventor Arieh A. Strod

Arieh A. Strod has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating Configuration For Use in Thermal Processing Chambers
    Publication number: 20110222840
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Application
    Filed: May 20, 2011
    Publication date: September 15, 2011
    Inventors: Zion Koren, Conor Patrick O' Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Arieh A. Strod
  • Heating configuration for use in thermal processing chambers
    Patent number: 7949237
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: May 24, 2011
    Assignee: Mattson Technology, Inc.
    Inventors: Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Arieh A. Strod
  • Heating Configuration for Use in Thermal Processing Chambers
    Publication number: 20070297775
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Application
    Filed: September 11, 2007
    Publication date: December 27, 2007
    Inventors: Zion Koren, Conor O'Carroll, Shuen Choy, Paul Timans, Rudy Santo Cardema, James Taoka, Arieh Strod
  • Heating configuration for use in thermal processing chambers
    Patent number: 7269343
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: September 11, 2007
    Assignee: Mattson Technology, Inc.
    Inventors: Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Arieh A. Strod
  • Heating configuration for use in thermal processing chambers
    Patent number: 6970644
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Grant
    Filed: December 21, 2000
    Date of Patent: November 29, 2005
    Assignee: Mattson Technology, Inc.
    Inventors: Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Arieh A. Strod
  • Heating configuration for use in thermal processing chambers
    Publication number: 20050213949
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Application
    Filed: May 19, 2005
    Publication date: September 29, 2005
    Inventors: Zion Koren, Conor O'Carroll, Shuen Choy, Paul Timans, Rudy Cardema, James Taoka, Arieh Strod
  • Heating configuration for use in thermal processing chambers
    Publication number: 20040018008
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Application
    Filed: December 21, 2000
    Publication date: January 29, 2004
    Applicant: Mattson Technology, Inc.
    Inventors: Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Paul Janis Timans, Rudy Santo Tomas Cardena, James Tsuneo Taoka, Arieh A. Strod