Patents by Inventor ARIETH A. STROD

ARIETH A. STROD has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heating Configuration for Use in Thermal Processing Chambers
    Publication number: 20140246422
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
    Type: Application
    Filed: March 5, 2014
    Publication date: September 4, 2014
    Applicant: MATTSON TECHNOLOGY, INC.
    Inventors: ZION KOREN, CONNOR PATRICK O'CARROLL, SHUEN CHUN CHOY, PAUL JANIS TIMANS, RUDY SANTO TOMAS CARDEMA, JAMES TSUNEO TAOKA, ARIETH A. STROD