Patents by Inventor Arisa KURODA

Arisa KURODA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11612979
    Abstract: A polishing pad has a disk-shaped substrate and a polishing layer of which an upper surface side is adhered to the substrate. The polishing layer includes a plurality of through-holes which penetrate the polishing pad vertically and which are supplied with a polishing liquid, and a plurality of grooves which are formed on the lower surface side of the polishing pad and which are connected to the through-holes. The plurality of through-holes are formed such as to surround the center of the polishing layer, and the plurality of grooves are formed radially from the plurality of through-holes toward the outer periphery of the polishing layer.
    Type: Grant
    Filed: August 15, 2019
    Date of Patent: March 28, 2023
    Assignee: DISCO CORPORATION
    Inventors: Katsuyoshi Kojima, Arisa Kuroda
  • Publication number: 20200061773
    Abstract: A polishing pad has a disk-shaped substrate and a polishing layer of which an upper surface side is adhered to the substrate. The polishing layer includes a plurality of through-holes which penetrate the polishing pad vertically and which are supplied with a polishing liquid, and a plurality of grooves which are formed on the lower surface side of the polishing pad and which are connected to the through-holes. The plurality of through-holes are formed such as to surround the center of the polishing layer, and the plurality of grooves are formed radially from the plurality of through-holes toward the outer periphery of the polishing layer.
    Type: Application
    Filed: August 15, 2019
    Publication date: February 27, 2020
    Inventors: Katsuyoshi KOJIMA, Arisa KURODA