Patents by Inventor Arjan HÖLSCHER

Arjan HÖLSCHER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to obtain a height map of a substrate having alignment marks, substrate alignment measuring apparatus and lithographic apparatus
    Patent number: 11307507
    Abstract: The present invention provides a method to obtain a height map of a substrate having alignment marks, the method comprising the steps: determining a height of one or more locations or areas of the substrate, and determining the height map of the substrate on the basis of the determined height of the one or more locations or areas of the substrate and a shape model of the substrate.
    Type: Grant
    Filed: June 5, 2018
    Date of Patent: April 19, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Bram Van Hoof, Arjan Hölscher, Alex Pascal Ten Brink, Petrus Franciscus Van Gils
  • Method to Obtain a Height Map of a Substrate Having Alignment Marks, Substrate Alignment Measuring Apparatus and Lithographic Apparatus
    Publication number: 20210116825
    Abstract: The present invention provides a method to obtain a height map of a substrate having alignment marks, the method comprising the steps: determining a height of one or more locations or areas of the substrate, and determining the height map of the substrate on the basis of the determined height of the one or more locations or areas of the substrate and a shape model of the substrate.
    Type: Application
    Filed: June 5, 2018
    Publication date: April 22, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Bram VAN HOOF, Arjan HÖLSCHER, Alex Pascal TEN BRINK, Petrus Franciscus VAN GILS