Patents by Inventor Arjun K. Kantimahanti

Arjun K. Kantimahanti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating a bottom oxide layer in a trench
    Patent number: 8633113
    Abstract: A method for fabricating a bottom oxide layer in a trench (102) is disclosed. The method comprises forming the trench (102) in a semiconductor substrate (100), depositing an oxide layer to partially fill a field area (104) and the trench (102), wherein said oxide layer has oxide overhang portions (106) and removing the oxide overhang portions (106) of the deposited oxide layer. Thereafter, the method comprises forming a bottom anti-reflective coating (BARC) layer (108) to cover the oxide layer in the field area (104) and the trench (102), removing the BARC layer (110) from the field area (104), while retaining a predetermined thickness of the BARC layer (112) in the trench (102), removing the oxide layer from the field area (104) and removing the BARC layer and oxide layer in the trench (102) to obtain a predetermined thickness of the bottom oxide layer (114).
    Type: Grant
    Filed: May 22, 2012
    Date of Patent: January 21, 2014
    Assignee: Silterra Malaysia Sdn Bhd
    Inventors: Charlie Tay, Venkatesh Madhaven, Arjun K. Kantimahanti
  • METHOD FOR FABRICATING A BOTTOM OXIDE LAYER IN A TRENCH
    Publication number: 20120309200
    Abstract: A method for fabricating a bottom oxide layer in a trench (102) is disclosed. The method comprises forming the trench (102) in a semiconductor substrate (100), depositing an oxide layer to partially fill a field area (104) and the trench (102), wherein said oxide layer has oxide overhang portions (106) and removing the oxide overhang portions (106) of the deposited oxide layer. Thereafter, the method comprises forming a bottom anti-reflective coating (BARC) layer (108) to cover the oxide layer in the field area (104) and the trench (102), removing the BARC layer (110) from the field area (104), while retaining a predetermined thickness of the BARC layer (112) in the trench (102), removing the oxide layer from the field area (104) and removing the BARC layer and oxide layer in the trench (102) to obtain a predetermined thickness of the bottom oxide layer (114).
    Type: Application
    Filed: May 22, 2012
    Publication date: December 6, 2012
    Inventors: Charlie Tay, Venkatesh Madhaven, Arjun K. Kantimahanti