Abstract: A translation stage may include a first plate and a second plate moveable with respect to the first plate along a vertical direction. The stage may also include one or more magnetic counterbalances opposing the weight of the second plate, where at least one of the one or more magnetic counterbalances comprises a tunable magnetic counterbalance. A tunable magnetic counterbalance may include a first portion including one or more magnets and a second portion including one or more ferromagnetic materials, where the one or more ferromagnetic materials at least partially surround the one or more magnets in a horizontal plane. The counterbalance force may be adjustable by controlling at least one of a relative rotation angle between the first and second portions in the horizontal plane or a length of the gap along at least one direction. The stage may also include an actuator to position the second plate.

Abstract: The system includes a support member configured to support a mirror, a fulcrum configured to centrally support the support member, and a base configured to support the fulcrum. A voice coil is disposed on the base member on one side of the fulcrum and connected to one end of the support member. A processor is configured to send an excitation signal to the voice coil, which causes the support member to oscillate relative to the fulcrum.

Abstract: A system includes a process chamber, a transport chamber connected to the process chamber, a robot arm that supports a workpiece, a chromatic confocal sensor, a temperature sensor, and a processor. The robot arm is configured to move the workpiece along a movement path between the process chamber and the transport chamber, and as the robot arm moves the workpiece along the movement path, the chromatic confocal sensor is configured to measure a wavelength of light reflected by the workpiece and the temperature sensor is configured to measure a surface temperature of the workpiece. The processor is configured to filter a first scanning signal received from the chromatic confocal sensor to produce a first filtered signal that compensates for temperature variations of the workpiece according to a first temperature signal received from the temperature sensor, and generate a first bow profile of the workpiece based on the first filtered signal.

Abstract: A system includes a process chamber, a transport chamber connected to the process chamber, a robot arm configured to support a workpiece, a chromatic confocal sensor, and a processor in electronic communication with the chromatic confocal sensor. The robot arm is configured to move the workpiece along a movement path between the process chamber and the transport chamber, and the chromatic confocal sensor is configured to measure a wavelength of light reflected by the workpiece as the robot arm moves the workpiece along the movement path. The processor is configured to receive a first scanning signal from the chromatic confocal sensor, filter the first scanning signal to produce a first filtered signal that compensates for vibrations of the robot arm while the robot arm moves the workpiece from the transport chamber to the process chamber, and generate a first bow profile of the workpiece based on the first filtered signal.

Abstract: A stage assembly for supporting and moving electronic components includes a guide rail. The stage assembly also includes a carrier for supporting an electronic component and moveable along a length of the guide rail. The stage assembly further includes a linear motor comprising a rotor and a stator assembly positioned along the length of the guide rail, the rotor operatively coupled to the carrier to actuate movement of the carrier along the length of the guide rail. The stage assembly yet further includes a flux shield formed of a ferromagnetic material and positioned between the stator assembly and the carrier. The stage assembly also includes one or more magnetic preload assemblies operatively coupled to the carrier.

Abstract: Some embodiments are directed to a system comprising a MEMS based actuator unit and a control electric circuit. The actuator unit comprising one or more MEMS actuators, each comprising a stator and a rotor and configured to define a payload position in response to electric potential between said stator and rotor. The electric circuit comprising one or more amplifiers configured to provide electric control signal to the one or more MEMS actuators to selectively vary position of said payload. The electric circuit comprises a sensing circuit configured for providing an alternating carrier signal and for monitoring said carrier signal to generate data on impedance of said one or more MEMS actuators indicative of position of the rotor with respect to the stator of said one or more MEMS actuators.

Abstract: A translation stage may include a first plate and a second plate moveable with respect to the first plate along a vertical direction. The stage may also include one or more magnetic counterbalances opposing the weight of the second plate, where at least one of the one or more magnetic counterbalances comprises a tunable magnetic counterbalance. A tunable magnetic counterbalance may include a first portion including one or more magnets and a second portion including one or more ferromagnetic materials, where the one or more ferromagnetic materials at least partially surround the one or more magnets in a horizontal plane. The counterbalance force may be adjustable by controlling at least one of a relative rotation angle between the first and second portions in the horizontal plane or a length of the gap along at least one direction. The stage may also include an actuator to position the second plate.

Abstract: Some embodiments are directed to a system comprising a MEMS based actuator unit and a control electric circuit. The actuator unit comprising one or more MEMS actuators, each comprising a stator and a rotor and configured to define a payload position in response to electric potential between said stator and rotor. The electric circuit comprising one or more amplifiers configured to provide electric control signal to the one or more MEMS actuators to selectively vary position of said payload. The electric circuit comprises a sensing circuit configured for providing an alternating carrier signal and for monitoring said carrier signal to generate data on impedance of said one or more MEMS actuators indicative of position of the rotor with respect to the stator of said one or more MEMS actuators.

Abstract: A flat surface tilting device including a selectably positionable flat surface element assembly defining a flat surface element having a flat surface and a pivot location portion, the pivot location portion being generally centered with respect to the flat surface, a pivot support element pivotably engaging the pivot location portion, an electromagnet, fixed with respect to the pivot support element and arranged for application of magnetic force in a direction generally perpendicular to the flat surface thereby to pivot the flat surface element about the pivot support element, a sensor for sensing the position of the flat surface element and feedback circuitry operative in response to an output of the sensor to govern operation of the electromagnet.

Abstract: A low-inertia flat surface tilting device including a selectably positionable flat surface element assembly defining a flat surface element having a flat surface and a pivot location portion, the pivot location portion being generally centered with respect to the flat surface, a pivot support element pivotably engaging the pivot location portion, an electromagnet, fixed with respect to the pivot support element and arranged for application of magnetic force in a direction generally perpendicular to the flat surface thereby to pivot the flat surface element about the pivot support element, a sensor for sensing the position of the flat surface element and feedback circuitry operative in response to an output of the sensor to govern operation of the electromagnet.