Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating has the steps of positioning an orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a directional on which a calibration is performed, scanning of a selected portion of the test object along axes X and Y; measuring values of a signal S versus coordinates x and y in a plane of scanning and storing said values S(x, y) in a digital form as a two-dimensional digital array; transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S(u, v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of the grating and a direction of a new axis V coincides with the strips of the grating; line-by-line mathematical processing in a new manner.

Abstract: A line edge roughness of micro objects is determined in a microscope by corresponding scanning and determination of deviations of points of the edge from a straight line.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus on coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u) including for each line approximating of an array of discrete values S(u, v) with a periodical analytical function determining a pitch o

Abstract: A method of precision calibration of magnification of a scanning microscope with the use of a test diffraction grating has the steps of positioning and orienting of a test object on a stage of microscopes so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning a selected portion of the test object along axes X and Y, measuring values of a signal S versus coordinates x and y in a plane of scanning and storing the values S (x,y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals (x, y) into a two-dimensional array S(u, v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of grating and a direction of a new axis V coincides with the strips of the grating, line-by-line mathematical processing of the array S(u, v) in a new manner.

Abstract: A method of measuring of sizes of trapezoidal objects along their lower base includes positioning an object to be measured in a scanning electron microscope so that a line of scanning of an object by an electronic beam corresponds with a direction along which a measurement is performed, selecting a magnification of the microscope so that an image of the object to be measured occupies a substantial part of a length of a scanning line, scanning a video signal of the object in accordance with coordinates along the scanning line, analyzing a shape of the video signal to determine whether the object to be measured has a smaller base facing upwardly a or downwardly, determining a location of stepped slopes on edge maxima of the video signal, and on each stepped slope-a reference point as a point on a lower step of the stepped slope where an absolute value of a derivative of the video signal has a maximum value, fixing of abcissa of the reference points in pixels, and calculating a size of the trapezoidal object alo

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus on coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u) including for each line approximating of an array of discrete values S(u,v) with a periodical analytical function determining a pitch of

Abstract: A scan nonlinearity in scan microscopes is determined so as to take into consideration of a contribution of a nonlinearity of scans and a uniformity of a test object in a total, imaginary nonlinearity of image.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating has the steps of positioning an orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a directional on which a calibration is performed, scanning of a selected portion of the test object along axes X and Y; measuring values of a signal S versus coordinates x and y in a plane of scanning and storing said values S(x, y) in a digital form as a two-dimensional digital array; transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S(u, v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of the grating and a direction of a new axis V coincides with the strips of the grating; line-by-line mathematical processing in a new manner.

Abstract: A method of precision calibration of magnification of a scanning microscopes with the use of a test diffraction grating has the steps of positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning a selected portion of the test object along axes X and Y, measuring values of a signal S versus coordinates x and y in a plane of scanning and storing the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S (x, y) into a two-dimensional array S(u,v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of grating and a direction of a new axis V coincides with the strips of the grating, line-by-line mathematical processing of the array S(u, v) in a new manner.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u,v) for each line, converting of the one dimensional, complex function into a one-dimension spectrum of real values of a module, finding from