Patents by Inventor Armand Eugene Koolen

Armand Eugene Koolen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of determining an illumination profile and device manufacturing method
    Publication number: 20070059614
    Abstract: An illumination profile useable in a lithographic apparatus to match the output of a target lithographic apparatus is obtained by obtaining a reference CD vs. pitch function for the lithographic projection apparatus at at least a plurality of pitch values using a reference illumination profile; obtaining a target CD vs. pitch function at at least the plurality of pitch values; generating a CD sensitivity map for the lithographic projection apparatus for a given pattern; calculating from the reference CD vs. pitch function, the target CD vs. pitch function and the CD sensitivity map, a suitable illumination profile to be used in said lithographic apparatus to expose said given pattern.
    Type: Application
    Filed: September 12, 2005
    Publication date: March 15, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Jozef Finders, Armand Eugene Koolen