Patents by Inventor Armando Valverde

Armando Valverde has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Physical vapor deposition plasma reactor with arcing suppression
    Patent number: 7804040
    Abstract: A physical vapor deposition reactor includes a vacuum chamber with a sidewall, a ceiling and a retractable wafer support pedestal near a floor of the chamber, and a vacuum pump coupled to the chamber, the retractable wafer support pedestal having an internal electrode and a grounded base with a conductive annular flange extending from the base. A metal sputter target at the ceiling is energized by a high voltage D.C. source. The reactor has an RF plasma source power generator with a frequency suitable for exciting kinetic electrons is coupled to either the sputter target or to the internal electrode of the pedestal.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: September 28, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Karl M. Brown, Semyon Sherstinksy, Vineet H. Mehta, Wei W. Wang, John A. Pipitone, Kurt J. Ahmann, Armando Valverde, Jr.
  • Physical vapor deposition plasma reactor with arcing suppression
    Publication number: 20070193982
    Abstract: A physical vapor deposition reactor includes a vacuum chamber with a sidewall, a ceiling and a retractable wafer support pedestal near a floor of the chamber, and a vacuum pump coupled to the chamber, the retractable wafer support pedestal having an internal electrode and a grounded base with a conductive annular flange extending from the base. A metal sputter target at the ceiling is energized by a high voltage D.C. source. The reactor has an RF plasma source power generator with a frequency suitable for exciting kinetic electrons is coupled to either the sputter target or to the internal electrode of the pedestal.
    Type: Application
    Filed: May 22, 2006
    Publication date: August 23, 2007
    Inventors: Karl Brown, Semyon Sherstinksy, Vineet Mehta, Wei Wang, John Pipitone, Kurt Ahmann, Armando Valverde