Abstract: A probe for monitoring a fluid medium employing at least one fiber optic emitting a wave into the fluid medium. The fluid medium scatters or causes luminescence of the emitted wave which is then collected by at least one fiber optic. The probe includes a base having a hole and a window covering the hole of the base, wherein the window transmits electromagnetic waves. The probe collects scattered and luminescence of waves through one or more fiber optics placed behind the window and transmits the waves to a spectrometer connected to a computer which can analyze the fluid medium on a real-time on-line basis. Piezoresistive and temperature sensing elements are deposited on the window which can also serve as a force collector diaphragm. The elements are located primarily on the periphery of the diaphragm leaving a part of the diaphragm open for transmission and collection of the waves.

Abstract: A probe for monitoring a fluid medium employing at least one fiber optic emitting a wave into the fluid medium. The fluid medium scatters or causes luminescence of the emitted wave which is then collected by at least one fiber optic. The probe includes a base having a hole and a window covering the hole of the base, wherein the window transmits electromagnetic waves. The probe collects scattered and luminescence of waves through one or more fiber optics placed behind the window and transmits the waves to a spectrometer connected to a computer which can analyze the fluid medium on a real-time on-line basis. Piezoresistive and temperature sensing elements are deposited on the window which can also serve as a force collector diaphragm. The elements are located primarily on the periphery of the diaphragm leaving a part of the diaphragm open for transmission and collection of the waves.

Abstract: A probe for monitoring a fluid medium employing at least one electromagnetic wave reflector and at least one fiber optic for analysis of the fluid medium. The probe includes a base having a hole, a window covering the hole of the base, wherein the window transmits electromagnetic waves and a electromagnetic reflector, spaced apart from the window, disposed to reflect at least part of the electromagnetic waves toward the window. The probe collects the reflected waves through one or more fiber optics placed behind a window to a fluid medium and transmits the waves to a spectrometer connected to a computer which analyzes the fluid medium on a real time on-line basis. Piezoresistive and temperature sensing elements are deposited on the window which also may function as a force collector diaphragm of thin refractory or a semiconductor materials. The piezoresistive elements are on the unsupported part of the diaphragm and at least part of the diaphragm is transparent to electromagnetic waves.

Abstract: A piezoresistive pressure transducer employing a sapphire force collector diaphragm having piezoresistive films of silicon epitaxially formed on a major surface thereof, preferably in a Wheatstone bridge pattern. The silicon piezoresistive film is preferably of a thickness of from 1,000 to 60,000 angstroms and is doped with boron in the range of from 5.times.10.sup.17 to 9.times.10.sup.20 atoms/cc. Electrical lead traces and electrical contact pads are also formed on the major surface of the force collector diaphragm. The diaphragm is mounted on a pressure cell base having a cavity in the upper surface thereof, the diaphragm enclosing the cavity so as to form a chamber with the piezoresistive silicon films within said chamber. The diaphragm is hermetically bonded by a ceramic glass to the base in a vacuum such that the chamber provides a vacuum pressure reference.

Abstract: A piezoresistive pressure transducer employing a sapphire force collector diaphragm having piezoresistive films of silicon epitaxially formed on a major surface thereof, preferably in a Wheatstone bridge pattern. The piezoresistive elements of the Wheatstone bridge are oriented and located so that the pressure sensitivity is maximized, while the linearity errors of the output voltage of the Wheatstone bridge in relationship to the applied pressure are minimized. The silicon piezoresistive film is preferably of a thickness of from 1000 to 60,000 angstroms and is doped with boron in the range of from 5.times.10.sup.17 to 9.times.10.sup.20 atoms/cc. Electrical arms and contact pads are also formed on the major surface of the force collector diaphragm. The diaphragm is mounted on a ceramic body having a cavity in the upper surface thereof, the diaphragm enclosing the cavity so as to form a protective chamber with the piezoresistive silicon films within the chamber.

Abstract: A piezoresistive pressure transducer employing a sapphire force collector diaphragm having piezoresistive films of silicon epitaxially formed on a major surface thereof, preferably in a Wheatstone bridge pattern. The silicon piezoresistive film is preferably of a thickness of from 1,000 to 60,000 angstroms and is doped with boron in the range of from 5.times.10.sup.17 to 9.times.10.sup.20 atoms/cc. Electrical lead traces and electrical contact pads are also formed on the major surface of the force collector diaphragm. The diaphragm is mounted on a pressure cell base having a cavity in the upper surface thereof, the diaphragm enclosing the cavity so as to form a chamber with the piezoresistive silicon films within said chamber. The diaphragm is hermetically bonded by a ceramic glass to the base in a vacuum such that the chamber provides a vacuum pressure reference.