Abstract: The invention relates to a device for generating a plurality of clock signals or high-frequency signals. The devices includes a reference signal generator, which is connected to an oscillator and generates at its output a reference signal with a reference frequency fx. The device also includes at least one signal processor, for example, a DDS, which is connected to the reference frequency generator via a first signal line and to which the reference signal with the reference frequency fx is supplied, and which is configured to generate an output signal having a frequency less than fx.

Abstract: The invention relates to a device for generating a plurality of clock signals or high-frequency signals. The devices includes a reference signal generator, which is connected to an oscillator and generates at its output a reference signal with a reference frequency fx. The device also includes at least one signal processor, for example, a DDS, which is connected to the reference frequency generator via a first signal line and to which the reference signal with the reference frequency fx is supplied, and which is configured to generate an output signal having a frequency less than fx.

Abstract: Methods, systems, and devices for phase balancing of a plurality of high frequency (HF) power generation units of an HF power supply system. In one aspect, a method includes measuring a first signal related to a first power reflected at a load and arriving at a first HF power generation unit, obtaining at least one first value related to the measured first signal in a system control, adjusting at least one of a frequency or a phase of an output signal of the first HF power generation unit based on the at least one first value and a reference value, measuring a second signal related to a second power reflected at the load and arriving at the first HF power generation unit, obtaining at least one second value related to the measured second signal in the system control, and determining whether a specified event for the first HF power generation unit occurs. The method also includes performing phase balancing of one or more further HF power generation units.