Patents by Inventor Armin Ridinger

Armin Ridinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of purifying target material for an EUV light source
    Patent number: 11317501
    Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: April 26, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Georgiy Vaschenko, Peter Baumgart, Chirag Rajyaguru, Benjamin Sams, Armin Ridinger, Janine Kardokus
  • METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SOURCE
    Publication number: 20200015343
    Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
    Type: Application
    Filed: September 16, 2019
    Publication date: January 9, 2020
    Inventors: Georgiy VASCHENKO, Peter BAUMGART, Chirag RAJYAGURU, Benjamin SAMS, Armin RIDINGER, Janine KARDOKUS
  • Method and apparatus for purifying target material for EUV light source
    Patent number: 10455680
    Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
    Type: Grant
    Filed: February 29, 2016
    Date of Patent: October 22, 2019
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Georgiy Vaschenko, Peter Baumgart, Chirag Rajyaguru, Benjamin Sams, Armin Ridinger, Janine Kardokus
  • METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SOURCE
    Publication number: 20170247778
    Abstract: A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.
    Type: Application
    Filed: February 29, 2016
    Publication date: August 31, 2017
    Inventors: Georgiy Vaschenko, Peter Baumgart, Chirag Rajyaguru, Benjamin Sams, Armin Ridinger, Janine Kardokus