Abstract: An optical element unit including an optical element and an optical element holder is disclosed. The optical element holder includes a holding element and coupling elements. The holding element holds the optical element and is made of a ceramic material. The elastic coupling elements are attached to the holding element and contact the optical element. The elastic coupling elements provide deformation decoupling between the holding element and the optical element.

Abstract: Arrangements for mounting an optical element, such as a lens or a mirror, are disclosed.

Abstract: An optical measuring system is provided with a measuring machine that has at least one measuring element for determining locations and at least one measuring element for determining angles. At least one common reference surface is provided for the location-determining measuring element and the angle-determining measuring element.

Abstract: A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.

Abstract: In a device (1) for preventing the creeping of an optical element (2), in particular a lens or a mirror, the optical element (2) is connected to a mount (3) via connecting members (4) arranged on the circumference of the optical element (2). The position of the optical element (2) in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element (2) at least one holding element (7) via which the optical element (2) is held on a housing part of the objective (PL) is provided in addition to the connecting members (4).

Abstract: An objective (2) with at least one optical element (4), which is mounted in an inner ring (3). The inner ring (3) is connected to an outer mount (1). A manipulator (10) is provided for displacing the optical element (4) in at least a direction perpendicular to an optical axis. The inner ring (3) is connected to the outer mount (1) by means of at least two adjusting joints (5) with manipulators (10) and at least one swivel joint (6). The at least two adjusting joints (5) and the at least one swivel joint (6) are provided with joint arms (8) extending at least approximately in a tangential direction with respect to the inner ring (3), by means of which arms the inner ring (3) is elastically connected to the outer mount (1).

Abstract: The invention relates to processes for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and also relates to an assembly. A process includes the following steps: forming a substance mixture at a processing temperature from at least a first component, which is solid at the processing temperature, and a second component, which is liquid at the processing temperature, the first component being dispersed in the second component, introducing the substance mixture in the unset state between the optical element and the mount, and setting the substance mixture so as to form a diffusion alloy from the first and second components.

Abstract: The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.

Abstract: An apparatus is used for holding an optical assembly in an imaging device which has a number of optical assemblies. The optical assembly is suspended via at least one decoupling element in at least one area in a supporting structure. The resultant effect of the at least one decoupling element in the at least one area is to impede possible movement, in terms of rotation or translation, in at least one suitable one of three orthogonal spatial directions, thus resulting in at least one statically defined bearing.

Abstract: The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.

Abstract: An objective (2) with at least one optical element (4), which is mounted in an inner ring (3). The inner ring (3) is connected to an outer mount (1). A manipulator (10) is provided for displacing the optical element (4) in at least a direction perpendicular to an optical axis. The inner ring (3) is connected to the outer mount (1) by means of at least two adjusting joints (5) with manipulators (10) and at least one swivel joint (6). The at least two adjusting joints (5) and the at least one swivel joint (6) are provided with joint arms (8) extending at least approximately in a tangential direction with respect to the inner ring (3), by means of which arms the inner ring (3) is elastically connected to the outer mount (1).

Abstract: An optical measuring system is provided with a measuring machine that has at least one measuring element for determining locations and at least one measuring element for determining angles. At least one common reference surface is provided for the location-determining measuring element and the angle-determining measuring element.

Abstract: A bearing arrangement comprises an optical element and a mount which are provided, in particular, for a projection objective in microlithography, the optical element being connected to the mount. The optical element and the mount are connected to one another in such a way that owing to a thermally induced expansion of the optical element and/or of the mount a tilting of the optical element relative to the mount results in it being possible to compensate aberrations which occur.

Abstract: The invention relates to an optical bench that has a base plate and can be permanently connected to an associated component. A receiving element for other optical elements that is arranged in such a way in relation to the base plate with connecting elements that it is deformable in its entirety in relation to said base plate, is allocated to the same.