Patents by Inventor Arnab Sen

Arnab Sen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240120415
    Abstract: Technologies for a field effect transistor (FET) with a ferroelectric gate dielectric are disclosed. In an illustrative embodiment, a perovskite stack is grown on a buffer layer as part of manufacturing a transistor. The perovskite stack includes one or more doped semiconductor layers alternating with other lattice-matched layers. Growing the doped semiconductor layers on lattice-matched layers can improve the quality of the doped semiconductor layers. The lattice-matched layers can be etched away, leaving the doped semiconductor layers as fins for a ribbon FET. A ferroelectric layer can be conformally grown on the fins, creating a high-quality ferroelectric layer above and below the fins. A gate can then be grown on the ferroelectric layer.
    Type: Application
    Filed: October 1, 2022
    Publication date: April 11, 2024
    Applicant: Intel Corporation
    Inventors: Scott B. Clendenning, Sudarat Lee, Kevin P. O'Brien, Rachel A. Steinhardt, John J. Plombon, Arnab Sen Gupta, Charles C. Mokhtarzadeh, Gauri Auluck, Tristan A. Tronic, Brandon Holybee, Matthew V. Metz, Dmitri Evgenievich Nikonov, Ian Alexander Young
  • Patent number: 11955560
    Abstract: A thin film transistor (TFT) structure includes a gate electrode, a gate dielectric layer on the gate electrode, a channel layer including a semiconductor material with a first polarity on the gate dielectric layer. The TFT structure also includes a multi-layer material stack on the channel layer, opposite the gate dielectric layer, an interlayer dielectric (ILD) material over the multi-layer material stack and beyond a sidewall of the channel layer. The TFT structure further includes source and drain contacts through the interlayer dielectric material, and in contact with the channel layer, where the multi-layer material stack includes a barrier layer including oxygen and a metal in contact with the channel layer, where the barrier layer has a second polarity. A sealant layer is in contact with the barrier layer, where the sealant layer and the ILD have a different composition.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: April 9, 2024
    Assignee: Intel Corporation
    Inventors: Abhishek A. Sharma, Arnab Sen Gupta, Travis W. LaJoie, Sarah Atanasov, Chieh-Jen Ku, Bernhard Sell, Noriyuki Sato, Van Le, Matthew Metz, Hui Jae Yoo, Pei-Hua Wang
  • Publication number: 20240113220
    Abstract: Technologies for a transistor with a thin-film ferroelectric gate dielectric are disclosed. In the illustrative embodiment, a transistor has a thin layer of scandium aluminum nitride (ScxAl1-xN) ferroelectric gate dielectric. The channel of the transistor may be, e.g., gallium nitride or molybdenum disulfide. In one embodiment, the ferroelectric polarization changes when voltage is applied and removed from a gate electrode, facilitating switching of the transistor at a lower applied voltage. In another embodiment, the ferroelectric polarization of a gate dielectric of a transistor changes when the voltage is past a positive threshold value or a negative threshold value. Such a transistor can be used as a one-transistor memory cell.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Arnab Sen Gupta, Ian Alexander Young, Dmitri Evgenievich Nikonov, Marko Radosavljevic, Matthew V. Metz, John J. Plombon, Raseong Kim, Uygar E. Avci, Kevin P. O'Brien, Scott B. Clendenning, Jason C. Retasket, Shriram Shivaraman, Dominique A. Adams, Carly Rogan, Punyashloka Debashis, Brandon Holybee, Rachel A. Steinhardt, Sudarat Lee
  • Publication number: 20240113212
    Abstract: Technologies for a field effect transistor (FET) with a ferroelectric gate dielectric are disclosed. In an illustrative embodiment, a perovskite stack is grown on a buffer layer as part of manufacturing a transistor. The perovskite stack includes one or more doped semiconductor layers alternating with other lattice-matched layers, such as undoped semiconductor layers. Growing the doped semiconductor layers on lattice-matched layers can improve the quality of the doped semiconductor layers. The lattice-matched layers can be preferentially etched away, leaving the doped semiconductor layers as fins for a ribbon FET. In another embodiment, an interlayer can be deposited on top of a semiconductor layer, and a ferroelectric layer can be deposited on the interlayer. The interlayer can bridge a gap in lattice parameters between the semiconductor layer and the ferroelectric layer.
    Type: Application
    Filed: September 29, 2022
    Publication date: April 4, 2024
    Applicant: Intel Corporation
    Inventors: Ian Alexander Young, Dmitri Evgenievich Nikonov, Marko Radosavljevic, Matthew V. Metz, John J. Plombon, Raseong Kim, Kevin P. O'Brien, Scott B. Clendenning, Tristan A. Tronic, Dominique A. Adams, Carly Rogan, Hai Li, Arnab Sen Gupta, Gauri Auluck, I-Cheng Tung, Brandon Holybee, Rachel A. Steinhardt, Punyashloka Debashis
  • Publication number: 20240105810
    Abstract: In one embodiment, transistor device includes a first source or drain material on a substrate, a semiconductor material on the first source or drain material, a second source or drain material on the semiconductor material, a dielectric layer on the substrate and adjacent the first source or drain material, a ferroelectric (FE) material on the dielectric layer and adjacent the semiconductor material, and a gate material on or adjacent to the FE material. The FE material may be a perovskite material and may have a lattice parameter that is less than a lattice parameter of the semiconductor material.
    Type: Application
    Filed: September 23, 2022
    Publication date: March 28, 2024
    Applicant: Intel Corporation
    Inventors: Rachel A. Steinhardt, Ian Alexander Young, Dmitri Evgenievich Nikonov, Marko Radosavljevic, Matthew V. Metz, John J. Plombon, Raseong Kim, Kevin P. O'Brien, Scott B. Clendenning, Tristan A. Tronic, Dominique A. Adams, Carly Rogan, Arnab Sen Gupta, Brandon Holybee, Punyashloka Debashis, I-Cheng Tung, Gauri Auluck
  • Publication number: 20240105854
    Abstract: Transistor structures may include a metal oxide contact buffer between a portion of a channel material and source or drain contact metallization. The contact buffer may improve control of transistor channel length by limiting reaction between contact metallization and the channel material. The channel material may be of a first composition and the contact buffer may be of a second composition.
    Type: Application
    Filed: December 4, 2023
    Publication date: March 28, 2024
    Applicant: Intel Corporation
    Inventors: Gilbert Dewey, Abhishek Sharma, Van Le, Jack Kavalieros, Shriram Shivaraman, Seung Hoon Sung, Tahir Ghani, Arnab Sen Gupta, Nazila Haratipour, Justin Weber
  • Publication number: 20240097031
    Abstract: In one embodiment, a transistor device includes a gate material layer on a substrate, a ferroelectric (FE) material layer on the gate material, a semiconductor channel material layer on the FE material layer, a first source/drain material on the FE material layer and adjacent the semiconductor channel material layer, and a second source/drain material on the FE material layer and adjacent the semiconductor channel material layer and on an opposite side of the semiconductor channel material layer from the first source/drain material. A first portion of the FE material layer is directly between the gate material and the first source/drain material, and a second portion of the FE material layer is directly between the gate material and the second source/drain material.
    Type: Application
    Filed: September 16, 2022
    Publication date: March 21, 2024
    Applicant: Intel Corporation
    Inventors: Punyashloka Debashis, Rachel A. Steinhardt, Brandon Holybee, Kevin P. O'Brien, Dmitri Evgenievich Nikonov, John J. Plombon, Ian Alexander Young, Raseong Kim, Carly Rogan, Dominique A. Adams, Arnab Sen Gupta, Marko Radosavljevic, Scott B. Clendenning, Gauri Auluck, Hai Li, Matthew V. Metz, Tristan A. Tronic, I-Cheng Tung
  • Publication number: 20240098938
    Abstract: Techniques for a vapor chamber with less dead space are disclosed. In an illustrative embodiment, a vapor chamber is formed by folding a sheet and sealing the edges. The edges seal the vapor chamber but take up a relatively large amount of space without allowing for vapor to be transported in that space. The folded edge takes up less space, reducing the overall footprint of the vapor chamber. The vapor chamber with a smaller footprint can allow for, e.g., more space for motherboard area, more space for a battery, and/or a smaller form factor overall.
    Type: Application
    Filed: December 1, 2023
    Publication date: March 21, 2024
    Applicant: Intel Corporation
    Inventors: Ravishankar Srikanth, Vijith Halestoph R, Prakash Kurma Raju, Arnab Sen, Isha Garg, Ezekiel Poulose, Avinash Manu Aravindan
  • Patent number: 11930620
    Abstract: There is disclosed in one example a heat dissipator for an electronic apparatus, including: a planar vapor chamber having a substantially rectangular form factor, wherein a second dimension d2 of the rectangular form factor is at least approximately twice a first dimension d1 of the rectangular form factor; a first fan and second fan; and a first heat pipe and second heat pipe discrete from the planar vapor chamber and disposed along first and second d1 edges of the planar vapor chamber, further disposed to conduct heat from the first and second d1 edges to the first and second fan respectively.
    Type: Grant
    Filed: June 27, 2020
    Date of Patent: March 12, 2024
    Assignee: Intel Corporation
    Inventors: Jeff Ku, Cora Nien, Gavin Sung, Tim Liu, Lance Lin, Wan Yu Liu, Gerry Juan, Jason Y. Jiang, Justin M. Huttula, Evan Piotr Kuklinski, Juha Tapani Paavola, Arnab Sen, Hari Shanker Thakur, Prakash Kurma Raju
  • Publication number: 20240006533
    Abstract: Contacts to p-type source/drain regions comprise a boride, indium, or gallium metal compound layer. The boride, indium, or gallium metal compound layers can aid in forming thermally stable low resistance contacts. A boride, indium, or gallium metal compound layer is positioned between the source/drain region and the contact metal layer. A boride, indium, or gallium metal compound layer can be used in contacts contacting p-type source/drain regions comprising boron, indium, or gallium as the primary dopant, respectively. The boride, indium, or gallium metal compound layers prevent diffusion of boron, indium, or gallium from the source/drain region into the metal contact layer and dopant deactivation in the source/drain region due to annealing and other high-temperature processing steps that occur after contact formation.
    Type: Application
    Filed: July 2, 2022
    Publication date: January 4, 2024
    Applicant: Intel Corporation
    Inventors: Gilbert Dewey, Siddharth Chouksey, Nazila Haratipour, Christopher Jezewski, Jitendra Kumar Jha, Ilya V. Karpov, Matthew V. Metz, Arnab Sen Gupta, I-Cheng Tung, Nancy Zelick, Chi-Hing Choi, Dan S. Lavric
  • Publication number: 20240006494
    Abstract: Semiconductor structures having a source and/or drain with a refractory metal cap, and methods of forming the same, are described herein. In one example, a semiconductor structure includes a channel, a gate, a source, and a drain. The source and drain contain silicon and germanium, and one or both of the source and drain are capped with a semiconductor cap and a refractory metal cap. The semiconductor cap is on the source and/or drain and contains germanium and boron. The refractory metal cap is on the semiconductor cap and contains a refractory metal.
    Type: Application
    Filed: July 1, 2022
    Publication date: January 4, 2024
    Applicant: Intel Corporation
    Inventors: Nazila Haratipour, Gilbert Dewey, Nancy Zelick, Siddharth Chouksey, I-Cheng Tung, Arnab Sen Gupta, Jitendra Kumar Jha, Chi-Hing Choi, Matthew V. Metz, Jack T. Kavalieros
  • Publication number: 20240006506
    Abstract: Contacts to n-type source/drain regions comprise a phosphide or arsenide metal compound layer. The phosphide or arsenide metal compound layers can aid in forming thermally stable low resistance contacts. A phosphide or arsenide metal compound layer is positioned between the source/drain region and the contact metal layer of the contact. A phosphide or arsenic metal compound layer can be used in contacts contacting n-type source/drain regions comprising phosphorous or arsenic as the primary dopant, respectively. The phosphide or arsenide metal compound layers prevent diffusion of phosphorous or arsenic from the source/drain region into the metal contact layer and dopant deactivation in the source/drain region due to annealing and other high-temperature processing steps that occur after contact formation.
    Type: Application
    Filed: July 2, 2022
    Publication date: January 4, 2024
    Applicant: Intel Corporation
    Inventors: Gilbert Dewey, Siddharth Chouksey, Nazila Haratipour, Christopher Jezewski, Jitendra Kumar Jha, Ilya V. Karpov, Jack T. Kavalieros, Arnab Sen Gupta, I-Cheng Tung, Nancy Zelick, Chi-Hing Choi, Dan S. Lavric
  • Publication number: 20240006488
    Abstract: In one embodiment, layers comprising Carbon (e.g., Silicon Carbide) are on source/drain regions of a transistor, e.g., before gate formation and metallization, and the layers comprising Carbon are later removed in the manufacturing process to form electrical contacts on the source/drain regions.
    Type: Application
    Filed: July 1, 2022
    Publication date: January 4, 2024
    Applicant: Intel Corporation
    Inventors: Nazila Haratipour, Gilbert Dewey, Nancy Zelick, Siddharth Chouksey, I-Cheng Tung, Arnab Sen Gupta, Jitendra Kumar Jha, David Kohen, Natalie Briggs, Chi-Hing Choi, Matthew V. Metz, Jack T. Kavalieros
  • Publication number: 20230420511
    Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for a transistor structure that includes stacked nanoribbons as a single crystal or monolayer, such as a transition metal dichalcogenide (TMD) layer, grown on a silicon wafer using a seeding material. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: June 27, 2022
    Publication date: December 28, 2023
    Inventors: Carl H. NAYLOR, Kirby MAXEY, Kevin P. O'BRIEN, Chelsey DOROW, Sudarat LEE, Ashish Verma PENUMATCHA, Uygar E. AVCI, Matthew V. METZ, Scott B. CLENDENNING, Chia-Ching LIN, Carly ROGAN, Arnab SEN GUPTA
  • Publication number: 20230411278
    Abstract: Metal insulator metal capacitors are described. In an example, a metal-insulator-metal (MIM) capacitor includes a first electrode that includes a bottom region and a pair of vertical regions. First metal layers are outside the vertical regions and in contact with the vertical regions. An insulator is over the first electrode. A second electrode is over the insulator. A second metal layer is on a top surface of the second electrode.
    Type: Application
    Filed: March 31, 2023
    Publication date: December 21, 2023
    Inventors: Chia-Ching LIN, Sou-Chi CHANG, Kaan OGUZ, Arnab SEN GUPTA, I-Cheng TUNG, Matthew V. METZ, Sudarat LEE, Scott B. CLENDENNING, Uygar E. AVCI, Aaron J. WELSH
  • Publication number: 20230411443
    Abstract: Metal insulator metal capacitors are described. In an example, a metal-insulator-metal (MIM) capacitor includes a first electrode. An insulator is over the first electrode. The insulator includes a first layer, and a second layer over the first layer. The first layer has a leakage current that is less than a leakage current of the second layer. The second layer has a dielectric constant that is greater than a dielectric constant of the first layer. A second electrode is over the insulator.
    Type: Application
    Filed: March 31, 2023
    Publication date: December 21, 2023
    Inventors: Kaan OGUZ, Chia-Ching LIN, Arnab SEN GUPTA, I-Cheng TUNG, Sou-Chi CHANG, Sudarat LEE, Matthew V. METZ, Uygar E. AVCI, Scott B. CLENDENNING, Ian A. YOUNG
  • Patent number: 11843058
    Abstract: Transistor structures may include a metal oxide contact buffer between a portion of a channel material and source or drain contact metallization. The contact buffer may improve control of transistor channel length by limiting reaction between contact metallization and the channel material. The channel material may be of a first composition and the contact buffer may be of a second composition.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: December 12, 2023
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Abhishek Sharma, Van Le, Jack Kavalieros, Shriram Shivaraman, Seung Hoon Sung, Tahir Ghani, Arnab Sen Gupta, Nazila Haratipour, Justin Weber
  • Publication number: 20230337406
    Abstract: An electronic device comprises a heat source and a heat distribution structure coupled to the heat source to distribute heat generated by the heat source during operation of the electronic device.
    Type: Application
    Filed: December 23, 2020
    Publication date: October 19, 2023
    Inventors: Ritu BAWA, Ruander CARDENAS, Kathiravan D, Jia Yan GO, Chin Kung GOH, Jeff KU, Prakash Kurma RAJU, Baomin LIU, Twan Sing LOO, Mikko MAKINEN, Columbia MISHRA, Juha PAAVOLA, Prasanna PICHUMANI, Daniel RAGLAND, Kannan RAJA, Khai Ern SEE, Javed SHAIKH, Gokul SUBRAMANIAM, George Baoci SUN, Xiyong TIAN, Hua YANG, Mark CARBONE, Vivek PARANJAPE, Nehakausar PINJARI, Hari Shanker THAKUR, Christopher MOORE, Gustavo FRICKE, Justin HUTTULA, Gavin SUNG, Sammi WY LIU, Arnab SEN, Chun-Ting LIU, Jason Y. JIANG, Gerry JUAN, Shih Wei NIEN, Lance LIN, Evan KUKLINSKI
  • Patent number: 11777029
    Abstract: A vertical transistor structure includes a material stack having a source material, a drain material, and a channel material therebetween. The vertical transistor structure further includes a gate electrode adjacent to a sidewall of the stack, where the sidewall includes the channel material, and at least a partial thickness of both the source material and the drain material. A gate dielectric is present between the sidewall of the stack and the gate electrode. The vertical transistor structure further includes a first metallization over a first area of the stack above the gate dielectric layer, and in contact with the gate electrode on sidewall of the stack. A second metallization is adjacent to the first metallization, where the second metallization is over a second area of the stack, and in contact with the source material or the drain material.
    Type: Grant
    Filed: June 27, 2019
    Date of Patent: October 3, 2023
    Assignee: Intel Corporation
    Inventors: Nazila Haratipour, I-Cheng Tung, Abhishek A. Sharma, Arnab Sen Gupta, Van Le, Matthew V. Metz, Jack Kavalieros, Tahir Ghani
  • Publication number: 20230253444
    Abstract: Described herein are capacitor devices formed using perovskite insulators. In one example, a perovskite templating material is formed over an electrode, and a perovskite insulator layer is grown over the templating material. The templating material improves the crystal structure and electrical properties in the perovskite insulator layer. One or both electrodes may be ruthenium. In another example, a perovskite insulator layer is formed between two layers of indium tin oxide (ITO), with the ITO layers forming the capacitor electrodes.
    Type: Application
    Filed: February 8, 2022
    Publication date: August 10, 2023
    Applicant: Intel Corporation
    Inventors: Arnab Sen Gupta, Kaan Oguz, Chia-Ching Lin, I-Cheng Tung, Sudarat Lee, Sou-Chi Chang, Matthew V. Metz, Scott B. Clendenning, Uygar E. Avci, Ian A. Young, Jason C. Retasket, Edward O. Johnson, JR.