Patents by Inventor Arnaud Favre

Arnaud Favre has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for monitoring the contamination of substrate wafers
    Publication number: 20060292037
    Abstract: A device is used to measure contamination directly in transport enclosures of FOUP or SMIF type, for example. The transport enclosure is placed on an adapter that sets up direct communication between it and an external gas analyzer. The gas analyzer ionizes the sampled gases and performs the analysis by measuring a parameter of the ions resulting from this ionization. This measures very low levels of gaseous contamination in real time.
    Type: Application
    Filed: March 17, 2006
    Publication date: December 28, 2006
    Inventors: Arnaud Favre, Remi Thollot, Xavier Metais, Jean-Pierre Desbiolles