Patents by Inventor Arnd Kilian

Arnd Kilian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11274375
    Abstract: The present invention concerns a tin plating bath comprising tin ions; at least one complexing agent selected from the group consisting of pyrophosphate ions, linear polyphosphate ions and cyclic polyphosphate ions and a nitrogen and sulfur containing stabilizing additive and titanium (III) ions as a reducing agent suitable to reduce tin ions to metallic tin. The present invention further discloses a method of depositing tin or a tin alloy onto a surface of a substrate. The tin plating bath is particularly suitable to be used in the electronics and semiconductor industry.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: March 15, 2022
    Assignee: Atotech Deutschland GmbH
    Inventors: Kadir Tuna, Arnd Kilian
  • Publication number: 20190345623
    Abstract: The present invention concerns a tin plating bath comprising tin ions; at least one complexing agent selected from the group consisting of pyrophosphate ions, linear polyphosphate ions and cyclic polyphosphate ions and a nitrogen and sulfur containing stabilizing additive and titanium (III) ions as a reducing agent suitable to reduce tin ions to metallic tin. The present invention further discloses a method of depositing tin or a tin alloy onto a surface of a substrate. The tin plating bath is particularly suitable to be used in the electronics and semiconductor industry.
    Type: Application
    Filed: December 20, 2017
    Publication date: November 14, 2019
    Inventors: Kadir TUNA, Arnd KILIAN
  • Patent number: 9441299
    Abstract: The present invention relates to method for activating a copper or copper alloy surface for depositing a metal or metal alloy layer by electroless (autocatalytic) plating thereon wherein the formation of undesired voids is suppressed. The copper or copper alloy surface is contacted with palladium ions, at least one phosphonate compound and halide ions followed by electroless (autocatalytic) deposition of a metal such as palladium or a metal alloy such as a Ni—P alloy.
    Type: Grant
    Filed: January 7, 2014
    Date of Patent: September 13, 2016
    Assignee: Atotech Deutschland GmbH
    Inventors: Arnd Kilian, Jens Wegricht, Donny Lautan
  • Patent number: 9435041
    Abstract: A method and apparatus for regenerating a plating composition which is suitable for depositing at least one first metal on a substrate where the plating rate in the plating composition is very low, where the concentration of the at least one first metal in the plating composition cannot be easily set at a constant level, and where plating-out of the at least one first metal from the plating composition takes place. The method and apparatus for regenerating a plating composition is suitable for depositing at least one first metal on a substrate at a sufficiently high plating rate, while offering the opportunity to easily adjust the concentration of the at least one first metal in the plating composition at a constant level and to provide the plating composition with sufficient stability against decomposition thereof in order to safeguard the regeneration cell from plated-out first metal.
    Type: Grant
    Filed: December 31, 2015
    Date of Patent: September 6, 2016
    Assignee: ATOTECH DEUTSCHLAND GMBH
    Inventors: Arnd Kilian, Christian Nöthlich, Dieter Metzger, Sebastian Kühne
  • Publication number: 20160153097
    Abstract: A method and apparatus for regenerating a plating composition which is suitable for depositing at least one first metal on a substrate where the plating rate in the plating composition is very low, where the concentration of the at least one first metal in the plating composition cannot be easily set at a constant level, and where plating-out of the at least one first metal from the plating composition takes place. The method and apparatus for regenerating a plating composition is suitable for depositing at least one first metal on a substrate at a sufficiently high plating rate, while offering the opportunity to easily adjust the concentration of the at least one first metal in the plating composition at a constant level and to provide the plating composition with sufficient stability against decomposition thereof in order to safeguard the regeneration cell from plated-out first metal.
    Type: Application
    Filed: December 31, 2015
    Publication date: June 2, 2016
    Applicant: Atotech Deutschland GmbH
    Inventors: Arnd Kilian, Christian Nöthlich, Dieter Metzger, Sabastian Kühne
  • Publication number: 20160040295
    Abstract: The present invention relates to method for activating a copper or copper alloy surface for depositing a metal or metal alloy layer by electroless (autocatalytic) plating thereon wherein the formation of undesired voids is suppressed. The copper or copper alloy surface is contacted with palladium ions, at least one phosphonate compound and halide ions followed by electroless (autocatalytic) deposition of a metal such as palladium or a metal alloy such as a Ni—P alloy.
    Type: Application
    Filed: January 7, 2014
    Publication date: February 11, 2016
    Inventors: Arnd KILIAN, Jens WEGRICHT, Donny LAUTAN
  • Patent number: 9249510
    Abstract: A method and apparatus for regenerating a plating composition which is suitable for depositing at least one first metal on a substrate where the plating rate in the plating composition is very low, where the concentration of the at least one first metal in the plating composition cannot be easily set at a constant level, and where plating-out of the at least one first metal from the plating composition takes place. The method and apparatus for regenerating a plating composition is suitable for depositing at least one first metal on a substrate at a sufficiently high plating rate, while offering the opportunity to easily adjust the concentration of the at least one first metal in the plating composition at a constant level and to provide the plating composition with sufficient stability against decomposition thereof in order to safeguard the regeneration cell from plated-out first metal.
    Type: Grant
    Filed: May 30, 2013
    Date of Patent: February 2, 2016
    Assignee: Atotech Deutschland GmbH
    Inventors: Arnd Kilian, Christian Nöthlich, Dieter Metzger, Sebastian Kühne
  • Patent number: 9057141
    Abstract: The invention concerns an immersion tin plating bath which comprises at least one aromatic sulfonic acid, at least one first precipitation additive and at least one second precipitation additive. The at least one first precipitation additive is an aliphatic poly-alcohol compound, an ether thereof or a polymer derived thereof having an average molecular weight in the range of 62 g/mol and 600 g/mol. The at least one second precipitation additive is a polyalkylene glycol compound having an average molecular weight in the range of 750 to 10,000 g/mol.
    Type: Grant
    Filed: January 3, 2012
    Date of Patent: June 16, 2015
    Assignee: Atotech Deutschland GmbH
    Inventors: Iris Barz, Arnd Kilian, Markus Muskulus, Britta Schafsteller
  • Publication number: 20150159275
    Abstract: A method and apparatus for regenerating a plating composition which is suitable for depositing at least one first metal on a substrate where the plating rate in the plating composition is very low, where the concentration of the at least one first metal in the plating composition cannot be easily set at a constant level, and where plating-out of the at least one first metal from the plating composition takes place. The method and apparatus for regenerating a plating composition is suitable for depositing at least one first metal on a substrate at a sufficiently high plating rate, while offering the opportunity to easily adjust the concentration of the at least one first metal in the plating composition at a constant level and to provide the plating composition with sufficient stability against decomposition thereof in order to safeguard the regeneration cell from plated-out first metal.
    Type: Application
    Filed: May 30, 2013
    Publication date: June 11, 2015
    Inventors: Arnd Kilian, Christian Nöthlich, Dieter Metzger, Sebastian Kühne
  • Patent number: 8987910
    Abstract: The present invention relates to a method of bonding a copper wire to a substrate, particularly a printed circuit board and an IC-substrate, possessing a layer assembly comprising a copper bonding portion and a palladium or palladium alloy layer and a substrate having a copper wire bonded to aforementioned layer assembly.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: March 24, 2015
    Assignee: Atotech Deutschland GmbH
    Inventors: Mustafa Özkök, Gustavo Ramos, Arnd Kilian
  • Patent number: 8888903
    Abstract: The present invention concerns an aqueous plating bath composition for electroless deposition of palladium and/or palladium alloys and a method which utilises such aqueous plating bath compositions. The aqueous plating bath comprises a source of palladium ions, a reducing agent, a nitrogenated complexing agent which is free of phosphorous and at least one organic stabilising agent comprising 1 to 5 phosphonate residues. The aqueous plating bath and the method are particularly useful if the aqueous plating bath comprises copper ions.
    Type: Grant
    Filed: August 22, 2012
    Date of Patent: November 18, 2014
    Assignee: Atotech Deutschland GmbH
    Inventors: Isabel-Roda Hirsekorn, Jens Wegricht, Arnd Kilian
  • Publication number: 20140242265
    Abstract: The present invention concerns an aqueous plating bath composition for electroless deposition of palladium and/or palladium alloys and a method which utilises such aqueous plating bath compositions. The aqueous plating bath comprises a source of palladium ions, a reducing agent, a nitrogenated complexing agent which is free of phosphorous and at least one organic stabilising agent comprising 1 to 5 phosphonate residues. The aqueous plating bath and the method are particularly useful if the aqueous plating bath comprises copper ions.
    Type: Application
    Filed: August 22, 2012
    Publication date: August 28, 2014
    Applicant: ATOTECH DEUTSCHLAND GMBH
    Inventors: Isabel-Roda Hirsekorn, Jens Wegricht, Arnd Kilian
  • Patent number: 8801844
    Abstract: An autocatalytic tin plating bath containing Sn2+ ions, Ti3+ ions as reducing agent, an organic complexing agent and phenanthroline or a derivative thereof as stabilizing agent is disclosed. The plating bath is suitable for manufacture of printed circuit boards, IC substrates and metallization of semiconductor wafers.
    Type: Grant
    Filed: January 11, 2012
    Date of Patent: August 12, 2014
    Assignee: Atotech Deutschland GmbH
    Inventors: Arnd Kilian, Jens Wegricht, Isabel-Roda Hirsekorn
  • Publication number: 20130309404
    Abstract: An autocatalytic tin plating bath containing Sn2+ ions, Ti3+ ions as reducing agent, an organic complexing agent and phenanthroline or a derivative thereof as stabilizing agent is disclosed. The plating bath is suitable for manufacture of printed circuit boards, IC substrates and metallization of semiconductor wafers.
    Type: Application
    Filed: January 11, 2012
    Publication date: November 21, 2013
    Applicant: Atotech Deutschland GmbH
    Inventors: Arnd Kilian, Jens Wegricht, Isabel-Roda Hirsekorn
  • Publication number: 20130288475
    Abstract: The present invention relates to a method of bonding a copper wire to a substrate, particularly a printed circuit board and an IC-substrate, possessing a layer assembly comprising a copper bonding portion and a palladium or palladium alloy layer and a substrate having a copper wire bonded to aforementioned layer assembly.
    Type: Application
    Filed: December 16, 2011
    Publication date: October 31, 2013
    Applicant: ATOTECH DEUTSCHLAND GMBH
    Inventors: Mustafa Özkök, Gustavo Ramos, Arnd Kilian
  • Publication number: 20130277226
    Abstract: The invention concerns an immersion tin plating bath which comprises at least one aromatic sulfonic acid, at least one first precipitation additive and at least one second precipitation additive. The at least one first precipitation additive is an aliphatic poly-alcohol compound, an ether thereof or a polymer derived thereof having an average molecular weight in the range of 62 g/mol and 600 g/mol. The at least one second precipitation additive is a polyalkylene glycol compound having an average molecular weight in the range of 750 to 10,000 g/mol.
    Type: Application
    Filed: January 3, 2012
    Publication date: October 24, 2013
    Applicant: ATOTECH DEUTSCHLAND GMBH
    Inventors: Iris Barz, Arnd Kilian, Markus Muskulus, Britta Schafsteller
  • Patent number: 7681306
    Abstract: Formation of a structure with through-holes includes attaching two sub-structures to one another. The resulting structure may be used in a sub-assembly for various types of micro components and may serve as a lid or base of a housing that encapsulates one or more micro components. The techniques may provide greater flexibility in the shape of the through-holes and may reduce costs compared with other known techniques.
    Type: Grant
    Filed: April 28, 2004
    Date of Patent: March 23, 2010
    Assignee: Hymite A/S
    Inventors: Matthias Heschel, Arnd Kilian
  • Patent number: 7543999
    Abstract: An optical module comprising an opto-electronic component, a lens and a mirror that is hermetically sealed by a micro housing containing a lid and a base is disclosed. The optical module may be assembled onto a moveable holder for aligning an optical beam into an optical assembly having an optical waveguide.
    Type: Grant
    Filed: September 12, 2005
    Date of Patent: June 9, 2009
    Assignee: Hymite A/S
    Inventors: Marcus Winter, Ralf Hauffe, Arnd Kilian
  • Patent number: 7467897
    Abstract: An optical module, such as a package for a vertical cavity surface emitting laser diode (VCSEL) or other light emitting device, includes monitoring of the emitted optical power by tapping the transmitted beam. The module includes a substrate, which carries the light emitting device and an optical monitor. In addition, the module includes a transparent plate with at least two reflective regions that together redirect part of the light from the light emitting device to the optical monitor.
    Type: Grant
    Filed: December 4, 2006
    Date of Patent: December 23, 2008
    Assignee: Hymite A/S
    Inventors: Ralf Hauffe, Arnd Kilian
  • Publication number: 20070292127
    Abstract: A camera module includes an image sensor substrate including image sensor circuitry, and a lens barrel. A lid structure includes a transparent window and is disposed between, and attached to, the lens barrel and the image sensor substrate. The lid structure may be fabricated as part of a wafer-level process.
    Type: Application
    Filed: June 19, 2006
    Publication date: December 20, 2007
    Inventors: Jochen Kuhmann, Andreas Alfred Hase, Ralf Hauffe, Arnd Kilian