Patents by Inventor Arndt Evers

Arndt Evers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vibration isolation system with one or more magnetic actuators
    Patent number: 11953073
    Abstract: An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.
    Type: Grant
    Filed: March 18, 2020
    Date of Patent: April 9, 2024
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Han Hartgers, Arndt Evers, Simon Schadt
  • VIBRATION ISOLATION SYSTEM WITH ONE OR MORE MAGNETIC ACTUATORS
    Publication number: 20220186808
    Abstract: An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.
    Type: Application
    Filed: March 18, 2020
    Publication date: June 16, 2022
    Inventors: Han HARTGERS, Arndt EVERS, Simon SCHADT
  • Vibration isolator with a vertically effective pneumatic spring
    Patent number: 10941833
    Abstract: A vibration isolator with a pneumatic spring that is effective only in vertical direction, the pneumatic spring including a working space in which a vertically effective actuator is disposed.
    Type: Grant
    Filed: October 25, 2016
    Date of Patent: March 9, 2021
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Arndt Evers, Frank Hofmann
  • Isolator for a stationary vibration isolation system
    Patent number: 10634210
    Abstract: An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: April 28, 2020
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Arndt Evers, Till Scharf
  • Pneumatic actuator and method for operating an active vibration isolation system
    Patent number: 10480609
    Abstract: A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: November 19, 2019
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Arndt Evers, Frank Hofmann, Han Hartgers, Till Scharf
  • Maintenance apparatus
    Patent number: 10322919
    Abstract: A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.
    Type: Grant
    Filed: March 3, 2017
    Date of Patent: June 18, 2019
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Andreas Birkner, Simon Schadt, Arndt Evers
  • SERVICE CART
    Publication number: 20180155126
    Abstract: The invention relates to a maintenance apparatus for a clean room or for systems in the clean room comprising a system component which can be moved horizontally and vertically. The system component is suspended on magnetic rails.
    Type: Application
    Filed: March 9, 2016
    Publication date: June 7, 2018
    Applicant: Integrated Dynamics Engineering GmbH
    Inventors: Ingo WEISKE, Arndt EVERS, Han HARTGERS, Andreas BIRKNER, Guido VAN LOON
  • Vibration isolator with pneumatic spring
    Patent number: 9869364
    Abstract: The invention relates to a vibration isolator with a pneumatic spring. The vibration isolator comprises a leaf spring assembly for vertical isolation and a flexible rod or a buckling pendulum for horizontal isolation.
    Type: Grant
    Filed: August 19, 2015
    Date of Patent: January 16, 2018
    Assignee: Integrated Dynamics Engineering GmbH
    Inventor: Arndt Evers
  • ISOLATOR FOR A STATIONARY VIBRATION ISOLATION SYSTEM
    Publication number: 20170370441
    Abstract: An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 28, 2017
    Inventors: Arndt EVERS, Till SCHARF
  • PNEUMATIC ACTUATOR AND METHOD FOR OPERATING AN ACTIVE VIBRATION ISOLATION SYSTEM
    Publication number: 20170370442
    Abstract: A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
    Type: Application
    Filed: June 9, 2017
    Publication date: December 28, 2017
    Inventors: Arndt EVERS, Frank HOFMANN, Han HARTGERS, Till SCHARF
  • Maintenance Apparatus
    Publication number: 20170267504
    Abstract: A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.
    Type: Application
    Filed: March 3, 2017
    Publication date: September 21, 2017
    Inventors: Andreas BIRKNER, Simon SCHADT, Arndt EVERS
  • VIBRATION ISOLATOR WITH A VERTICALLY EFFECTIVE PNEUMATIC SPRING
    Publication number: 20170175845
    Abstract: A vibration isolator with a pneumatic spring that is effective only in vertical direction, the pneumatic spring including a working space in which a vertically effective actuator is disposed.
    Type: Application
    Filed: October 25, 2016
    Publication date: June 22, 2017
    Inventors: Arndt Evers, Frank Hofmann
  • Vibration isolator with coil spring
    Patent number: 9500244
    Abstract: The invention relates to a vibration isolator that includes a coil spring. In a horizontal direction, the coil spring is stiffly coupled to the base or to the load to be isolated.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: November 22, 2016
    Assignee: Integrated Dynamics Engineering GmbH
    Inventor: Arndt Evers
  • VIBRATION ISOLATOR WITH PNEUMATIC SPRING
    Publication number: 20160084339
    Abstract: The invention relates to a vibration isolator with a pneumatic spring. The vibration isolator comprises a leaf spring assembly for vertical isolation and a flexible rod or a buckling pendulum for horizontal isolation.
    Type: Application
    Filed: August 19, 2015
    Publication date: March 24, 2016
    Inventor: Arndt Evers
  • Vibration isolator with coil spring
    Publication number: 20140209778
    Abstract: The invention relates to a vibration isolator that includes a coil spring. In a horizontal direction, the coil spring is rigidly connected to the base or to the load to be isolated.
    Type: Application
    Filed: January 27, 2014
    Publication date: July 31, 2014
    Inventor: ARNDT EVERS
  • Magnetic actor and a method for its installation
    Patent number: 8541911
    Abstract: The invention relates to a magnetic actor in which the permanent magnets are arranged in a Halbach configuration and inserted into a slide-in frame.
    Type: Grant
    Filed: December 3, 2010
    Date of Patent: September 24, 2013
    Assignee: Integrated Dynamics Engineering GmbH
    Inventors: Arndt Evers, Ralf Tillmann
  • Magnetic Actor and a Method for its Installation
    Publication number: 20110169346
    Abstract: The invention relates to a magnetic actor in which the permanent magnets are arranged in a Halbach configuration and inserted into a slide-in frame.
    Type: Application
    Filed: December 3, 2010
    Publication date: July 14, 2011
    Applicant: INTEGRATED DYNAMICS ENGINEERING GMBH
    Inventors: Arndt Evers, Ralf Tillmann