Abstract: To monitor functions in a micro-fluidic system having mutually similar parallel fluid paths, sensors (7) are assigned to the individual fluid paths (5) at the same respective locations, in order to measure a physical parameter that is influenced by the fluid stream in the fluid paths (5). The sensors (7) are connected to an evaluation device (10), which diagnoses a change in the operating state of the micro-fluidic system based on the differences in the parameters measured by the sensors (7).

Abstract: The invention relates to a method for verification of particles, in particular of nanoparticles (16), in which a sensor area (15) is made available for this purpose, on which the particles can accumulate. The invention also relates to a sensor arrangement having a sensor area (15) which is suitable for carrying out the method mentioned. The invention provides for a plurality of sensor areas (15) to be arranged, on which particles which each have different characteristics can accumulate. For example, this makes it possible to classify nanoparticles (16) of different size, thus advantageously allowing a statement to be made on the size distribution of the nanoparticles (16) in a nanopowder.

Abstract: A reactor with a reaction chamber (14), which is produced for example by etching or other micro-mechanical production processes. An agitating device (20) is formed for example by an electrical field generator (18), which acts on electrical charge carriers (21) of the sample fluid, and consequently leads to circulation or mixing of the sample fluid. As an alternative, a magnetic field generator which acts on magnetic particles in the sample fluid may also be used. The reactor permits the extensive miniaturization of test reactors for bioprocesses, since circulation of the fluid to achieve a quasi steady-state bioprocess is possible the agitating devices even under extremely confined spatial conditions.

Abstract: A cladding (22) for a wall (12) includes a barrier layer (24) that can be deformed by the action of a polymer actuator (14). According to the invention, a contact surface (A) of the cladding lies completely against the wall, at least in the non-deformed state, stabilising the intrinsically elastic wall cladding. For example, the wall cladding can be fixed to the wall (12) in the form of lamellae (22), at respective points, in such a way that the activation of the polymer actuator (14) causes the lamellae (22) to bend, thus permitting, for example, a layer (25) of ice to be detached from the cladding. Alternatively, the cladding can also be configured from a membrane actuator, which is fixed at points, or by its entire surface to the wall (12).

Abstract: The invention relates to a method for verification of particles, in particular of nanoparticles (16), in which a sensor area (15) is made available for this purpose, on which the particles can accumulate. The invention also relates to a sensor arrangement having a sensor area (15) which is suitable for carrying out the method mentioned. The invention provides for a plurality of sensor areas (15) to be arranged, on which particles which each have different characteristics can accumulate. For example, this makes it possible to classify nanoparticles (16) of different size, thus advantageously allowing a statement to be made on the size distribution of the nanoparticles (16) in a nanopowder.

Abstract: A pressure transmitter has a housing (11) on which a pressure sensor (12) is fastened. There is provided in the housing a region, produced micromechanically, with reduced wall thickness that forms a separating diaphragm (22) such that the fluid located in a channel (16) does not act on the pressure sensor (12). The pressure sensor (12) is connected with a sensor diaphragm (24) directly to the separating diaphragm via a connecting layer (23), thereby rendering possible a highly space-saving design of the pressure transmitter. Consequently, the pressure transmitter can be formed, for example, by the pressure sensor and a channel structure, for example a microreactor, produced in a micromechanical design. A small dead volume in the channel structure is thereby produced in the region of the pressure transmitter.

Abstract: A pressure transmitter has a housing (11) on which a pressure sensor (12) is fastened. There is provided in the housing a region, produced micromechanically, with reduced wall thickness that forms a separating diaphragm (22) such that the fluid located in a channel (16) does not act on the pressure sensor (12). The pressure sensor (12) is connected with a sensor diaphragm (24) directly to the separating diaphragm via a connecting layer (23), thereby rendering possible a highly space-saving design of the pressure transmitter. Consequently, the pressure transmitter can be formed, for example, by the pressure sensor and a channel structure, for example a microreactor, produced in a micromechanical design. A small dead volume in the channel structure is thereby produced in the region of the pressure transmitter.

Abstract: A system for automated treatment of fluids having interchangeable process modules (39, 40, 41, 42, 43), which are arranged next to each other, and which are respectively provided with a control unit and a fluid unit. The fluid unit is controlled by the control unit in order to carry out a module-specific process function during the treatment of the fluids. The control units are interconnected via a data bus (48), which is common to the process modules (39, 40, 41, 42, 43), and the fluid units are interconnected by a fluid bus (49) that has several channels. A fluid bus section is provided for at least one part of the channels inside each process module (e.g., 42). This section has fluid bus interfaces (52) at the ends thereof. A connection unit (51) is configured to be mounted between the respectively adjacent fluid bus interfaces (52) of two successive process modules (e.g., 41, 42) in at least two different mounting positions.

Abstract: A microreactor in which interaction partners (14) are immobilized on the reactor wall (15) and a catalyst (21) is bound to these interaction partners. The catalyst (21) is preferably bound to the interaction partners (14) by hybridization of corresponding oligonucleotides. Furthermore, catalyst particles (21) which can be attached to fixed interaction partners (14) by a coupling-on partner (23) provided for this purpose are disclosed. The microreactor is suitable and advantageous for flexible use since a multiplicity of different catalyst particles can be attached to the tube walls of the reaction space (12) without any great difficulty. These compounds can be detached again, so that the microreactor can be used in succession for different reactions. The microreactor is suitable, for upstream processing of a bioprocess.

Abstract: To monitor functions in a micro-fluidic system having mutually similar parallel fluid paths, sensors (7) are assigned to the individual fluid paths (5) at the same respective locations, in order to measure a physical parameter that is influenced by the fluid stream in the fluid paths (5). The sensors (7) are connected to an evaluation device (10), which diagnoses a change in the operating state of the micro-fluidic system based on the differences in the parameters measured by the sensors (7).

Abstract: A system for carrying out the automated processing of fluids. The system has combinable and interchangeable process modules (38, 39, 40), which each contain a control unit (6) and a fluid unit (7) that can be controlled by the control unit in order to execute a module-specific process function. The control units (6) are interconnected via a data bus (10) which is shared by process modules (38, 39, 40), and the fluid units (7) are interconnected via a fluid bus (44) having a number of channels (45). The configuration of at least one portion of the channels (45) of the fluid buses (44) can be varied in the areas of their respective connection to the fluid units (7) by using configuration devices, which can be provided in the form of adapters (41, 42, 43) located between the process modules (38, 39, 40) and the fluid bus (44).

Abstract: A system for automated treatment of fluids having interchangeable process modules (39, 40, 41, 42, 43), which are arranged next to each other, and which are respectively provided with a control unit and a fluid unit. The fluid unit is controlled by the control unit in order to carry out a module-specific process function during the treatment of the fluids. The control units are interconnected via a data bus (48), which is common to the process modules (39, 40, 41, 42, 43), and the fluid units are interconnected by a fluid bus (49) that has several channels. A fluid bus section is provided for at least one part of the channels inside each process module (e.g., 42). This section has fluid bus interfaces (52) at the ends thereof. A connection unit (51) is configured to be mounted between the respectively adjacent fluid bus interfaces (52) of two successive process modules (e.g., 41, 42) in at least two different mounting positions.

Abstract: A reactor with a reaction chamber (14), which is produced for example by etching or other micro-mechanical production processes. An agitating device (20) is formed for example by an electrical field generator (18), which acts on electrical charge carriers (21) of the sample fluid, and consequently leads to circulation or mixing of the sample fluid. As an alternative, a magnetic field generator which acts on magnetic particles in the sample fluid may also be used. The reactor permits the extensive miniaturization of test reactors for bioprocesses, since circulation of the fluid to achieve a quasi steady-state bioprocess is possible the agitating devices even under extremely confined spatial conditions.

Abstract: A system for carrying out the automated processing of fluids. The system has combinable and interchangeable process modules (38, 39, 40), which each contain a control unit (6) and a fluid unit (7) that can be controlled by the control unit in order to execute a module-specific process function. The control units (6) are interconnected via a data bus (10) which is shared by process modules (38, 39, 40), and the fluid units (7) are interconnected via a fluid bus (44) having a number of channels (45). The configuration of at least one portion of the channels (45) of the fluid buses (44) can be varied in the areas of their respective connection to the fluid units (7) by using configuration devices, which can be provided in the form of adapters (41, 42, 43) located between the process modules (38, 39, 40) and the fluid bus (44).

Abstract: A separation-column unit includes a support plate having a groove formed therein on one side and running, for example, in the form of a spiral, and having a cover plate which bears against this side. In order to achieve the high separation capacity combined with a high load-bearing capacity with regard to the amount of sample flowing through, the depth (d) of the groove is preferably at least three times greater than its width. The base of the groove preferably has a rounded cross section, it being possible for the cover plate to contain a corresponding channel.

Abstract: To switch gas flows between gas sources and gas sinks, a gas flow switching device includes gas passages, which communicate with one another and which have connecting points for the gas sources and the gas sinks. Furthermore, the gas flow switching device has a device for setting different pressures. To simplify the construction of the gas flow switching device and to achieve precisely defined pressure and flow conditions without the need for calibration, the gas flow switching device has two plates (9, 10), which are positioned on top of one another and joined together. The two plates (9, 10) have congruent channels (11) on their respective sides that face one another. These channels (11) have semicircular cross sections and form gas passages (4 to 8). In addition, at their lateral exit points from the plates (9, 10), the channels (11) form connecting points (12 to 17).

Abstract: To switch gas flows between gas sources and gas sinks, a gas flow switching device includes gas passages, which communicate with one another and which have connecting points for the gas sources and the gas sinks. Furthermore, the gas flow switching device has a device for setting different pressures. To simplify the construction of the gas flow switching device and to achieve precisely defined pressure and flow conditions without the need for calibration, the gas flow switching device has two plates (9, 10), which are positioned on top of one another and joined together. The two plates (9, 10) have congruent channels (11) on their respective sides that face one another. These channels (11) have semicircular cross sections and form gas passages (4 to 8). In addition, at their lateral exit points from the plates (9, 10), the channels (11) form connecting points (12 to 17).

Abstract: A method for determining the crystal orientation of a wafer using anisotropic etching in which an etching mask having mask openings such as circle scale marks arranged one beside the other is applied in relation to a preexisting marking of the wafer. Mask openings are configured in a double-T shape and are arranged one beside the other so that their first, transversely extending segments and the second transversely extending segments are situated at a predetermined distance apart and the areas connecting the segments are situated equidistant. The crystal orientation is determined with the distance of the two particular adjacent mask openings, the intervening space of which is least undercut, from the preexisting marking.

Abstract: In an ink print head of sandwich type construction which works according to the bubble-jet principle, the heating elements, electric lines and contacts, as well as the shoot out openings are advantageously produced in the same chip by planar processing steps (back-shooter principle). The heating elements and the shoot out openings are arranged so as to be laterally offset relative to one another in such a way that the spreading direction of the steam bubble is directed opposite to the ink shooting direction. Such an arrangement results in a simple and accordingly inexpensive production of such ink print heads since all precision processing steps are advantageously effected in a planar process and joined on one element.