Abstract: A cover for a roller having at least one roller (2) for transporting a substrate (1) in a deposition system and at least one cover means (6), wherein the roller is retractable away from the substrate and the cover means is adapted for at least partly covering the retracted roller against contamination by a substance present in the deposition system. The cover for a roller has the advantage that the uptime of the deposition system is increased.

Abstract: The present invention provides a hot-trap device (1) comprising an enclosure (2) with at least one inlet (3), at least one outlet (5) at least one heating means (7) and at least one collector means (10) for the conversion of reaction by-products into products, wherein the collector means is arranged within the enclosure between the inlet and the outlet has a diameter that substantially matches the diameter of the enclosure and has at least one opening (18).

Abstract: The present invention provides a hot-trap device (1) comprising an enclosure (2) with at least one inlet (3), at least one outlet (5) at least one heating means (7) and at least one collector means (10) for the conversion of reaction by-products into products, wherein the collector means is arranged within the enclosure between the inlet and the outlet has a diameter that substantially matches the diameter of the enclosure and has at least one opening (18).

Abstract: A cover for a roller having at least one roller (2) for transporting a substrate (1) in a deposition system and at least one cover means (6), wherein the roller is retractable away from the substrate and the cover means is adapted for at least partly covering the retracted roller against contamination by a substance present in the deposition system. The cover for a roller has the advantage that the uptime of the deposition system is increased.

Abstract: Known devices for coating a continuous web of material (13) comprise a casting container (1) which consists of a casting surface (8) for the discharge of the coating material in a free falling curtain (C); at least one distribution chamber (2) which extends in a transversal manner in relation to the direction of circulation of the web of material and which comprises a supply line (10) for the coating material and an discharge slit (9) which discharges onto the casting surface (8), and two lateral guiding elements (7, 12) which extend in a downward direction for the edges of the curtain (C). According to the invention, the lateral guiding elements (7, 12) are curved on the upper end thereof corresponding to the course of the casting surface, (8) whereon (8) the lateral guiding elements are fixed in an adjustable transversal manner and the coating material supply line (10) leads into the valve chamber (2) in the central area of the casting container (1).

Abstract: An inline vacuum processing apparatus for processing of substrates in vacuum comprises at least one load-lock chamber, at least two subsequent deposition chambers to be operated with essentially the same set of coating parameters and at least one unload-lock chamber plus means for transferring, post-processing and/or handling substrates through and in the various chambers. A method for depositing a thin film on a substrate in such processing system comprises the steps of introducing a first substrate into a load-lock chamber, lowering the pressure in said chamber; transferring the substrate into a first deposition chamber; depositing a layer of a first material on said first substrate using a first set of coating parameters; transferring said first substrate into a second, subsequent deposition chamber of said inline system without breaking vacuum and depositing a further layer of said first material on said first substrate using substantially the same set of parameters.