Patents by Inventor Arnold Aronsen

Arnold Aronsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measuring the profile of a polishing pad in a chemical mechanical polishing system
    Patent number: 5974679
    Abstract: A pad profiler has a three-point mount support the profiler above a polishing pad. A slider assembly is supported on a guide, and a sensor is connected to the slider assembly and positioned over a diametric segment of the polishing pad. The profiler uses a lead screw to drive the slider assembly across the polishing pad. The advantages of the invention include the measurement of the thickness of polishing pad to optimize polishing process parameters or to select a conditioning process. Additional advantages include stable support of the profiler over the pad, and smooth motion of the sensor along a radius of the pad.
    Type: Grant
    Filed: March 1, 1999
    Date of Patent: November 2, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Manoocher Birang, Arnold Aronsen
  • Apparatus for measuring the profile of a polishing pad in a chemical mechanical polishing system
    Patent number: 5875559
    Abstract: A pad profiler has a three-point mount support the profiler above a polishing pad. A slider assembly is supported on a guide, and a sensor is connected to the slider assembly and positioned over a diametric segment of the polishing pad. The profiler uses a lead screw to drive the slider assembly across the polishing pad. The advantages of the invention include the measurement of the thickness of polishing pad to optimize polishing process parameters or to select a conditioning process. Additional advantages include stable support of the profiler over the pad, and smooth motion of the sensor along a radius of the pad.
    Type: Grant
    Filed: October 27, 1995
    Date of Patent: March 2, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Manoocher Birang, Arnold Aronsen