Patents by Inventor Arnold Aronson

Arnold Aronson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Buffer station on CMP system
    Patent number: 6244931
    Abstract: A chemical mechanical polishing system is provided having a buffer station disposed therein or adjacent thereto. The buffer station includes two or more substrate supports for supporting two or more substrates adjacent to an inspection station. The two or more substrate supports are mounted on a mounting plate which is connected to an actuator for moving a pair of substrate supports laterally towards or away from each other over the inspection station.
    Type: Grant
    Filed: April 2, 1999
    Date of Patent: June 12, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Jay D. Pinson, Arulkumar Shanmugasundram, Arnold Aronson, Rodney Lum