Abstract: An adaptable end effector may include a substrate interface may be configured to support a substrate. The substrate interface may include multiple groups of vacuum openings that are associated with a plurality of types of substrates. A vacuum system may be configured to supply vacuum only to one or more selected groups of vacuum openings that are associated with a given type of substrates when the adaptable end effector supports a substrate of the given type of substrates.

Abstract: A chuck that comprises a vacuum system, an upper surface, a groove and a flexible sealing element, wherein at least a bottom portion of the flexible sealing element is positioned within the groove, wherein each one of the groove and the flexible sealing element surrounds a region of the upper surface, wherein the vacuum system is configured to supply vacuum to the region of the upper surface and wherein the flexible sealing element is configured to move between a top position in which an upper portion of the flexible sealing element extends above the upper surface and between a bottom position in which the upper portion of the flexible sealing element does not extend above the upper surface.

Abstract: An adaptable end effector may include a substrate interface may be configured to support a substrate. The substrate interface may include multiple groups of vacuum openings that are associated with a plurality of types of substrates. A vacuum system may be configured to supply vacuum only to one or more selected groups of vacuum openings that are associated with a given type of substrates when the adaptable end effector supports a substrate of the given type of substrates.

Abstract: An adaptable cassette holder that may include an interface; an interface holder for holding the interface; multiple recesses formed in the interface; multiple movable cassette holders that positioned at least partially within the multiple recesses; and wherein the movable cassette holders are movable between different positions that correspond to different area of the bottom of the cassette from each other.

Abstract: An illumination module that may include a LED driver; a group of light emitting diodes (LEDs) that comprises at least one LED; the group of LED is coupled to the LED driver; wherein the LED driver is arranged to activate the group of LEDs by driving a high current short duration driving signal; and wherein the group of LEDs is arranged to emit at least one light pulse in response to the high current short duration driving signal.

Abstract: According to an embodiment of the invention there is provided a system that may include a pivot chuck that may include : a lower chuck portion; an upper chuck portion; a first distance changing module that may include a pivot mechanism and an angle changing element; wherein the pivot mechanism pivotally couples the lower chuck portion to the upper chuck portion; wherein the angle changing element is coupled between the upper and lower chuck portions; wherein the upper chuck portion may be arranged to support a substrate; wherein the angle changing element may be arranged to induce a rotation of the upper chuck portion in relation to the pivot mechanism in response to first focus correction signals.

Abstract: An illumination module that may include a LED driver; a group of light emitting diodes (LEDs) that comprises at least one LED; the group of LED is coupled to the LED driver; wherein the LED driver is arranged to activate the group of LEDs by driving a high current short duration driving signal; and wherein the group of LEDs is arranged to emit at least one light pulse in response to the high current short duration driving signal.

Abstract: An illumination module that may include a LED driver; a strip cable comprising multiple conductors that have a high ratio form factor and a low impedance and a low inductance factor; the forms factor is a ratio between a width of the strip cable and a thickness of the strip cable; a group of light emitting diodes (LEDs) that comprises at least one LED; the group of LED is coupled to the LED driver via the strip cable; wherein the LED driver is arranged to activate the group of LEDs by driving a high current short duration driving signal via the strip cable; and wherein the group of LEDs is arranged to emit at least one light pulse in response to the high current short duration driving signal.

Abstract: A method and an inspection system that includes: a multi wafer support device arranged to concurrently support multiple wafers; optics arranged to acquire images of the multiple wafers supported by the multi wafer support element; a mechanical stage arranged to introduce movement between the multi wafer support element and the optics; and a processor arranged to process the images acquired by the optics.

Abstract: A device and a method for supporting an optical component (240) of an optical evaluation system, the device includes: (a) a supporting element (220) that includes a sloped portion (222); (b) at least one movement control component (210) that is coupled to the sloped portion; and (c) a movable element (230), adapted to move along the at least one movement control component; wherein the movable element is adapted to support the optical component; wherein when the movable element supports the optical component a center Of gravity of a combination of the movable element and the optical component is positioned above, the sloped portion or in proximity to the sloped portion.

Abstract: An illumination module that may include a LED driver; a strip cable comprising multiple conductors that have a high ratio form factor and a low impedance and a low inductance factor; the forms factor is a ratio between a width of the strip cable and a thickness of the strip cable; a group of light emitting diodes (LEDs) that comprises at least one LED; the group of LED is coupled to the LED driver via the strip cable; wherein the LED driver is arranged to activate the group of LEDs by driving a high current short duration driving signal via the strip cable; and wherein the group of LEDs is arranged to emit at least one light pulse in response to the high current short duration driving signal.

Abstract: A device. and a method for supporting an optical component (240) of an optical evaluation system, the device includes: (a) a supporting element (220) that includes a sloped portion (222); (b) at least one movement control component (210) that is coupled to the sloped portion; and (c) a movable element (230), adapted to move along the at least one movement control component; wherein the movable element is adapted to support the optical component; wherein when the movable element supports the optical component a center Of gravity of a combination of the movable element and the optical component is positioned above, the sloped portion or in proximity to the sloped portion.