Patents by Inventor Arnoud Willem Notenboom

Arnoud Willem Notenboom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic Clamp
    Publication number: 20150370178
    Abstract: An electrostatic clamp (12) comprising an electrode (2), a layer of resistive material (6) located on the electrode, and a layer of dielectric (8) located on the resistive material, wherein the electrostatic clamp further comprises burls (10) which project from the layer of dielectric.
    Type: Application
    Filed: December 5, 2013
    Publication date: December 24, 2015
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Petrus Augustinus Franciscus KLOMP, Bastiaan Matthias MERTENS, Arnoud Willem NOTENBOOM
  • Electrostatic Clamp, Lithographic Apparatus and Method
    Publication number: 20150103325
    Abstract: An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive material located on the electrode, and a dielectric portion (22) formed from a dielectric material located on the resistive portion.
    Type: Application
    Filed: March 19, 2013
    Publication date: April 16, 2015
    Inventors: Ronald Van Der Wilk, Roger Schmitz, Arnoud Willem Notenboom, Manon Elise Will
  • Chuck, a Chuck Control System, a Lithography Apparatus and a Method of Using a Chuck
    Publication number: 20140253900
    Abstract: A chuck, chuck control system, lithographic apparatus and method of using a chuck are disclosed.
    Type: Application
    Filed: September 19, 2012
    Publication date: September 11, 2014
    Applicant: ASML Netherlands B.V.
    Inventors: Sebastiaan Maria Johannes Cornelissen, Noud Jan Gilissen, Anko Jozef Cornelus Sijben, Roger Wilhelmus Antonius Henricus Schmitz, Arnoud Willem Notenboom, Ronald Van Der Wilk, Manon Elise Will