Patents by Inventor Aron Abramowski Mason

Aron Abramowski Mason has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pressure sensing device
    Patent number: 7698952
    Abstract: At least one pair of capacitively coupled electrodes contained in a structure is used to sense the deflection of a diaphragm in a pressure or force sensor for measuring the pressure or force exerted on the diaphragm. Preferably the structure has properties (such as one or more of the following: dimensions, hardness, area and flexibility) that are substantially the same as those of a real substrate, such as a semiconductor wafer or flat panel display panel.
    Type: Grant
    Filed: September 25, 2007
    Date of Patent: April 20, 2010
    Assignee: KLA-Tencor Corporation
    Inventors: Wayne G. Renken, Mei H. Sun, Aron Abramowski Mason, Lynn Karl Wiese
  • Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
    Patent number: 7497134
    Abstract: At least one shear force sensor is used to measure the shear force on a member, when the member is in contact with and pressed against a polishing or planarization surface and a lateral force is applied between the two surfaces. Preferably the structure and the surface of the structure have properties (such as one or more of the following: dimensions and coefficient of friction) that are substantially the same as those of a real substrate, such as a semiconductor wafer or flat panel display panel.
    Type: Grant
    Filed: September 25, 2007
    Date of Patent: March 3, 2009
    Assignee: KLA-Tencor Corporation
    Inventors: Wayne G. Renken, Mei H. Sun, Aron Abramowski Mason