Patents by Inventor Aron J. CEPLER

Aron J. CEPLER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measuring local CD uniformity using scatterometry and machine learning
    Patent number: 12165023
    Abstract: A method, a system, and a non-transitory computer readable medium for measuring a local critical dimension uniformity of an array of two-dimensional structural elements, the method may include obtaining an acquired optical spectrometry spectrum of the array; feeding the acquired optical spectrometry spectrum of the array to a trained machine learning process, wherein the trained machine learning process is trained to map an optical spectrometry spectrum to an average critical dimension (CD) and a local critical dimension uniformity (LCDU); and outputting, by the trained machine learning process, the average CD and the LCDU of the array.
    Type: Grant
    Filed: February 23, 2021
    Date of Patent: December 10, 2024
    Assignees: NOVA LTD., INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dexin Kong, Daniel Schmidt, Aron J. Cepler, Marjorie Cheng, Roy Koret, Igor Turovets
  • MEASURING LOCAL CD UNIFORMITY USING SCATTEROMETRY AND MACHINE LEARNING
    Publication number: 20230131932
    Abstract: A method, a system, and a non-transitory computer readable medium for measuring a local critical dimension uniformity of an array of two-dimensional structural elements, the method may include obtaining an acquired optical spectrometry spectrum of the array; feeding the acquired optical spectrometry spectrum of the array to a trained machine learning process, wherein the trained machine learning process is trained to map an optical spectrometry spectrum to an average critical dimension (CD) and a local critical dimension uniformity (LCDU); and outputting, by the trained machine learning process, the average CD and the LCDU of the array.
    Type: Application
    Filed: February 23, 2021
    Publication date: April 27, 2023
    Applicants: NOVA LTD., INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Dexin KONG, DANIEL SCHMIDT, Aron J. CEPLER, Marjorie CHENG, Roy KORET, Igor TUROVETS