Patents by Inventor Arpan P. Mohorowala

Arpan P. Mohorowala has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9472402
    Abstract: Increased protection of areas of a chip are provided by both a mask structure of increased robustness in regard to semiconductor manufacturing processes or which can be removed with increased selectivity and controllability in regard to underlying materials, or both. Mask structures are provided which exhibit an interface of a chemical reaction, grain or material type which can be exploited to enhance either or both types of protection. Structures of such masks include TERA material which can be converted or hydrated and selectively etched using a mixture of hydrogen fluoride and a hygroscopic acid or organic solvent, and two layer structures of similar or dissimilar materials.
    Type: Grant
    Filed: September 16, 2014
    Date of Patent: October 18, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Deok-kee Kim, Kenneth T. Settlemyer, Jr., Kangguo Cheng, Ramachandra Divakaruni, Carl J. Radens, Dirk Pfeiffer, Timothy J. Dalton, Katherina E. Babich, Arpan P. Mohorowala, Harald Okorn-Schmidt
  • Publication number: 20150004802
    Abstract: Increased protection of areas of a chip are provided by both a mask structure of increased robustness in regard to semiconductor manufacturing processes or which can be removed with increased selectivity and controllability in regard to underlying materials, or both. Mask structures are provided which exhibit an interface of a chemical reaction, grain or material type which can be exploited to enhance either or both types of protection. Structures of such masks include TERA material which can be converted or hydrated and selectively etched using a mixture of hydrogen fluoride and a hygroscopic acid or organic solvent, and two layer structures of similar or dissimilar materials.
    Type: Application
    Filed: September 16, 2014
    Publication date: January 1, 2015
    Inventors: Deok-kee Kim, Kenneth T. Settlemyer, JR., Kangguo Cheng, Ramachandra Divakaruni, Carl J. Radens, Dirk Pfeiffer, Timothy J. Dalton, Katherina E. Babich, Arpan P. Mohorowala, Harald Okorn-Schmidt