Patents by Inventor Art M. Shulenberger

Art M. Shulenberger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4639587
    Abstract: An automatic microscope focusing system including a light source 44, a dual channel fiber optics bundle 56 and 58, chopper means 54 for alternately admitting light to the channels, a reticle 66 and associated optics to cast alternating images onto the surface of an inspected article W, return masks 82 and 88, and associated detectors 86 and 92 for inspecting the alternating reticle images, and control circuitry 36 and 38 responsive to the detector outputs and operative to drive the system microscope 10 into focus. The preferred embodiment also includes a flipping pupil 60 for accommodating particular microscope objectives.
    Type: Grant
    Filed: January 22, 1985
    Date of Patent: January 27, 1987
    Assignee: KLA Instruments Corporation
    Inventors: Curt H. Chadwick, Art M. Shulenberger, John S. Taylor, Richard R. Simmons