Patents by Inventor Artak Hambarian

Artak Hambarian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optic probe for semiconductor characterization
    Patent number: 7420669
    Abstract: Described herein is an optical probe (120) for use in characterizing surface defects in wafers, such as semiconductor wafers. The optical probe (120) detects laser light reflected from the surface (124) of the wafer (106) within various ranges of angles. Characteristics of defects in the surface (124) of the wafer (106) are determined based on the amount of reflected laser light detected in each of the ranges of angles. Additionally, a wafer characterization system (100) is described that includes the described optical probe (120).
    Type: Grant
    Filed: July 1, 2004
    Date of Patent: September 2, 2008
    Assignee: Midwest Research Institute
    Inventors: Bhushan L. Sopori, Artak Hambarian