Patents by Inventor Arthur D. Gonzales

Arthur D. Gonzales has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polysilicon mask for etching thick insulator
    Patent number: 4148133
    Abstract: An improved method is disclosed for etching the thick field insulator films of silicon-oxy-nitride, during the fabrication process of metal oxide semiconductor (MOS) devices, wherein a polycrystalline silicon etch mask is used in conjunction with an acid etchant to etch the gate and interconnect openings through the thick field insulator to the source, gate and chain regions of the MOS devices for a memory array.
    Type: Grant
    Filed: May 8, 1978
    Date of Patent: April 10, 1979
    Assignee: Sperry Rand Corporation
    Inventors: Leroy J. Kochel, Harvey W. Kalweit, Arthur D. Gonzales, Clyde L. Church, Paul H. Ou-Yang