Patents by Inventor Arthur D. Thompson, III

Arthur D. Thompson, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor devices by laser enhanced diffusion
    Patent number: 4343832
    Abstract: A process is described for the doping of semiconductors utilizing laser beam melting of the semiconductor surface in the presence of a dopant source. By selecting the laser wavelength to satisfy one of several criteria relating the semiconductor absorption coefficient and wafer thickness, or the dopant thickness and doping depth, the heating and melting are constrained to occur in a small local region near the surface where the laser beam impinges. Use of this invention to produce Zener diodes having abrupt doping profiles, as well as other device structures, is also discussed.
    Type: Grant
    Filed: October 2, 1980
    Date of Patent: August 10, 1982
    Assignee: Motorola, Inc.
    Inventors: James N. Smith, Arthur D. Thompson, III