Patents by Inventor Arthur Erland Swaving

Arthur Erland Swaving has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 9606457
    Abstract: A substrate handler for transferring substrates to be exposed from a track to a lithographic apparatus. The substrate handler comprises a controller. The controller is configured to determine an instance for starting a transfer process of a first one of the substrates. The instance is based on a predetermined processing characteristic of the lithographic apparatus, in order to maintain a transfer period of the substrate in the substrate handler substantially constant.
    Type: Grant
    Filed: January 24, 2013
    Date of Patent: March 28, 2017
    Assignee: ASML Netherlands B.V.
    Inventors: Norbertus Josephus Martinus Van Den Nieuwelaar, Petrus Franciscus Van Gils, Arthur Erland Swaving