Patents by Inventor Arthur L. Ruoff

Arthur L. Ruoff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion beam exposure of (g-Ge.sub.x -Se.sub.1-x) inorganic resists
    Patent number: 4405710
    Abstract: This invention relates to thin (g-Ge.sub.x -Se.sub.1--x) positive ionresists and thin (g-Ge.sub.x -Se.sub.1--x) with absorbed or chemically bonded silver as a negative ionresist, which when exposed to H.sup.+ ion beams and subsequently developed, for example by alkaline solutions, have a useful differential dissolution rate, when comparing exposed and unexposed areas, with excellent resolution. The ionresist materials and processes of the invention are useful, for example, in forming solid-state electronic articles.
    Type: Grant
    Filed: June 22, 1981
    Date of Patent: September 20, 1983
    Assignee: Cornell Research Foundation, Inc.
    Inventors: Karanam Balasubramanyam, Arthur L. Ruoff
  • Diamond targets for producing high intensity soft x-rays and a method of exposing x-ray resists
    Patent number: 4266138
    Abstract: The present invention relates to diamond targets for carbon K x-ray generators and to a method for exposing x-ray sensitive resists to carbon K x-rays using an x-ray generator with a diamond target. It has been discovered that diamond targets, preferably of Type IIb diamond, will dissipate considerably more power and thus produce higher intensity x-rays than graphite targets despite diamond's lower limiting temperature. Such x-rays allow one to expose an x-ray resist through a mask in only 67 seconds and achieve a resolution of 0.2.mu..
    Type: Grant
    Filed: July 11, 1978
    Date of Patent: May 5, 1981
    Assignee: Cornell Research Foundation, Inc.
    Inventors: David A. Nelson, Jr., Arthur L. Ruoff