Patents by Inventor Arun Mahadevan Venkataraman
Arun Mahadevan Venkataraman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230055116Abstract: An inspection system includes a radiation source that generates a beam of radiation and irradiates a first surface of an object, defining a region of the first surface of the object. The radiation source also irradiates a second surface of the object, defining a region of the second surface, wherein the second surface is at a different depth level within the object than the first surface. The inspection system may also include a detector that defines a field of view (FOV) of the first surface including the region of the first surface, and receives radiation scattered from the region of the first surface and the region of the second surface. The inspection system may also include a processor that discards image data not received from the region of the first surface, and constructs a composite image comprising the image data from across the region of the first surface.Type: ApplicationFiled: January 21, 2021Publication date: February 23, 2023Applicant: ASML Holding N.V.Inventors: Peter Conrad KOCHERSPERGER, Christopher Michael DOHAN, Justin Lloyd KREUZER, Michal Emanuel PAWLOWSKI, Aage BENDIKSEN, Kirill Urievich SOBOLEV, James Hamilton WALSH, Roberto B. WIENER, Arun Mahadevan VENKATARAMAN
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Patent number: 8982481Abstract: A system and method is described for correcting aberrations caused by field curvature with a catadioptric objective. In one example, a catadioptric optical system includes a first catadioptric element and a second catadioptric element. The first catadioptric element includes a first surface positioned to reflect a beam and a second surface positioned to focus the beam reflected by the first surface. The second catadioptric element is configured to receive the beam reflected by the second surface of the first catadioptric element. The second catadioptric element includes a third surface positioned to reflect the beam, and a fourth reflective surface positioned to focus the beam reflected by the third reflective surface. A curvature of the third or fourth surfaces of the second catadioptric element is chosen to apply a positive contribution to a field curvature associated with the first catadioptric element.Type: GrantFiled: November 28, 2012Date of Patent: March 17, 2015Assignee: ASML Holding N.V.Inventors: Stanislav Y. Smirnov, Adel Joobeur, Yevgeniy Konstantinovich Shmarev, Arun Mahadevan Venkataraman
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Patent number: 8625199Abstract: A beam modifying unit increases both temporal pulse length and Etendue of an illumination beam. The pulse modifying unit receives an input pulse of radiation and emits one or more corresponding output pulses of radiation. A beam splitter divides the incoming pulse into a first and a second pulse portion, and directs the first pulse portion along a second optical path and the second portion along a first optical path as a portion of an output beam. The second optical path includes a divergence optical element. A first and a second mirror, each with a radius of curvature, are disposed facing each other with a predetermined separation, and receive the second pulse portion to redirect the second portion, such that the optical path of the second portion through the pulse modifier is longer than that of the first portion, and the separation is less than radius of curvature.Type: GrantFiled: June 30, 2011Date of Patent: January 7, 2014Assignees: ASML Holding N.V., ASML Netherlands B.V.Inventors: Adel Joobeur, Oscar Franciscus Jozephus Noordman, Paul Van Der Veen, Arun Mahadevan Venkataraman
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Patent number: 8610874Abstract: A pulse stretcher includes a beam splitter configured to split an input light beam into first and second beams, a con-focal resonator including first and second con-focal mirrors, and a fold mirror. The beam splitter, con-focal resonator, and fold mirror are optically arranged such that at least a portion of the first beam is recombined with the second beam into a modified beam after an optical delay of the first beam caused by the optical arrangement. The apparatus further includes one or more optical elements in an optical path of the input light beam prior to the beam splitter such that a focal point of the first beam is formed at a distance away from the fold mirror preventing energy density-related damage to the fold mirror. The apparatus can further include one or more additional optical elements to provide re-conditioning of the modified beam. A related method is also disclosed.Type: GrantFiled: April 27, 2010Date of Patent: December 17, 2013Assignee: ASML Holding N.V.Inventors: Arun Mahadevan Venkataraman, Jonathan Rodney
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Publication number: 20110255173Abstract: A beam modifying unit increases both temporal pulse length and Etendue of an illumination beam. The pulse modifying unit receives an input pulse of radiation and emits one or more corresponding output pulses of radiation. A beam splitter divides the incoming pulse into a first and a second pulse portion, and directs the first pulse portion along a second optical path and the second portion along a first optical path as a portion of an output beam. The second optical path includes a divergence optical element. A first and a second mirror, each with a radius of curvature, are disposed facing each other with a predetermined separation, and receive the second pulse portion to redirect the second portion, such that the optical path of the second portion through the pulse modifier is longer than that of the first portion, and the separation is less than radius of curvature.Type: ApplicationFiled: June 30, 2011Publication date: October 20, 2011Applicants: ASML Netherlands B.V., ASML Holding N.V.Inventors: Adel JOOBEUR, Oscar Franciscus Jozephus Noordman, Paul Van Der Veen, Arun Mahadevan Venkataraman
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Patent number: 8004770Abstract: A beam modifying unit increases both temporal pulse length and Etendue of an illumination beam. The pulse modifying unit receives an input pulse of radiation and emits one or more corresponding output pulses of radiation. A beam splitter divides the incoming pulse into a first and a second pulse portion, and directs the first pulse portion along a second optical path and the second portion along a first optical path as a portion of an output beam. The second optical path includes a divergence optical element. A first and a second mirror, each with a radius of curvature, are disposed facing each other with a predetermined separation, and receive the second pulse portion to redirect the second portion, such that the optical path of the second portion through the pulse modifier is longer than that of the first portion, and the separation is less than radius of curvature.Type: GrantFiled: November 10, 2009Date of Patent: August 23, 2011Assignees: ASML Holding N.V., ASML Netherlands B.V.Inventors: Adel Joobeur, Oscar Franciscus Jozephus Noordman, Paul Van Der Veen, Arun Mahadevan Venkataraman
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Publication number: 20100302522Abstract: A pulse stretcher includes a beam splitter configured to split an input light beam into first and second beams, a con-focal resonator including first and second con-focal mirrors, and a fold mirror. The beam splitter, con-focal resonator, and fold mirror are optically arranged such that at least a portion of the first beam is recombined with the second beam into a modified beam after an optical delay of the first beam caused by the optical arrangement. The apparatus further includes one or more optical elements in an optical path of the input light beam prior to the beam splitter such that a focal point of the first beam is foamed at a distance away from the fold mirror preventing energy density-related damage to the fold mirror. The apparatus can further include one or more additional optical elements to provide re-conditioning of the modified beam. A related method is also disclosed.Type: ApplicationFiled: April 27, 2010Publication date: December 2, 2010Applicant: ASML Holding N.V.Inventors: Arun Mahadevan VENKATARAMAN, Jonathan Rodney
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Publication number: 20100163757Abstract: A beam modifying unit increases both temporal pulse length and Etendue of an illumination beam. The pulse modifying unit receives an input pulse of radiation and emits one or more corresponding output pulses of radiation. A beam splitter divides the incoming pulse into a first and a second pulse portion, and directs the first pulse portion along a second optical path and the second portion along a first optical path as a portion of an output beam. The second optical path includes a divergence optical element. A first and a second mirror, each with a radius of curvature, are disposed facing each other with a predetermined separation, and receive the second pulse portion to redirect the second portion, such that the optical path of the second portion through the pulse modifier is longer than that of the first portion, and the separation is less than radius of curvature.Type: ApplicationFiled: November 10, 2009Publication date: July 1, 2010Applicants: ASML Holding N.V., ASML Netherlands B.V.Inventors: Adel Joobeur, Oscar Franciscue Jozephus Noordman, Paul Van der veen, Arun Mahadevan Venkataraman