Abstract: Nocturia has been defined as the need for an individual to wake up one or more times during the night to void. Further, Nocturia detection also requires analysis of sleeping pattern of the person. In such cases a lot of assumptions are made when the person is not in bedroom during nights. A method and system for detection and validation of Nocturia in the person has been provided. The system is utilizing a statistical based analysis, a rule based analysis, a machine learning based analysis and analysis of sleeping pattern of the person to detect and validate Nocturia. The system ensures that the person is not disturbed in his/her daily activities. Further, the processes deployed in the system are completely un-supervisory in nature meaning it does not have the dependency of needing to have trained machine learning dataset.

Abstract: A processor implemented method of determining personalized wellness measures associated plurality of dimensions of an individual is provided. The processor implemented method includes at least one of: receiving, plurality of information associated with plurality of sensors; processing, the plurality of information associated with the plurality of sensors to obtain plurality of low-level features; determining, at least one digital behavioral marker based on the plurality of low-level features; processing, at least one dimension associated with a plurality of well-being of the individual based on the at least one digital behavioral marker to determine a set of objective features; generating, one or more wellness scores for the set of objective features associated with the at least one well-being dimension of the individual; and dynamically recommending, one or more behavior changes based on the one or more generated wellness scores of the individual.

Abstract: A variable geometry turbine comprising a turbine wheel mounted for rotation about a turbine axis within a housing. The housing defines an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls. The turbine further comprises a cylindrical sleeve that is axially movable across the annular inlet to vary the size of a gas flow path through the inlet. The annular inlet is divided into at least two axially offset inlet passages. The inner diameter of the sleeve is greater than the inner diameter of the inlet passages.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A variable geometry turbine comprising a turbine wheel mounted for rotation about a turbine axis within a housing. The housing defines an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls. The turbine further comprises a cylindrical sleeve that is axially movable across the annular inlet to vary the size of a gas flow path through the inlet. The annular inlet is divided into at least two axially offset inlet passages. The inner diameter of the sleeve is greater than the inner diameter of the inlet passages.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A variable geometry turbine comprising a turbine wheel mounted for rotation about a turbine axis within a housing. The housing defines an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls. The turbine further comprises a cylindrical sleeve that is axially movable across the annular inlet to vary the size of a gas flow path through the inlet. The annular inlet is divided into at least two axially offset inlet passages. The inner diameter of the sleeve is greater than the inner diameter of the inlet passages.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A method of forming a titanium nitride (TiN) diffusion barrier includes exposing a deposition surface to a first pulse of a titanium-containing precursor and to a first pulse of a nitrogen-rich plasma to form a first TiN layer with a first nitrogen concentration making a lower portion of the TiN diffusion barrier, the first nitrogen concentration of the first TiN layer is increased by the first pulse of the nitrogen-rich plasma reducing a reactivity of the lower portion of the TiN diffusion barrier to prevent fluorine diffusion. The first TiN layer is exposed to second pulses of the titanium-containing precursor and the nitrogen-rich plasma to form a second TiN layer with a second nitrogen concentration above the first TiN layer making an upper portion of the TiN diffusion barrier, the first pulse of the nitrogen-rich plasma has a substantially longer duration than the second pulse of the nitrogen-rich plasma.

Abstract: A variable geometry turbine comprising a turbine wheel mounted for rotation about a turbine axis within a housing. The housing defines an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls. The turbine further comprises a cylindrical sleeve that is axially movable across the annular inlet to vary the size of a gas flow path through the inlet. The annular inlet is divided into at least two axially offset inlet passages. The inner diameter of the sleeve is greater than the inner diameter of the inlet passages.

Abstract: A variable geometry turbine comprising a turbine wheel mounted for rotation about a turbine axis within a housing. The housing defines an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls. The turbine further comprises a cylindrical sleeve that is axially movable across the annular inlet to vary the size of a gas flow path through the inlet. The annular inlet is divided into at least two axially offset inlet passages. The inner diameter of the sleeve is greater than the inner diameter of the inlet passages.

Abstract: A method includes forming a first metal liner conformally along a sidewall and a bottom of a contact opening. A second metal liner is formed above and in direct contact with the first metal liner, a grain size of the first metal liner is larger than a grain size of the second metal liner. A barrier layer is formed above and in direct contact with the second metal liner and the contact opening is filled with a conductive material to form a middle-of-the-line contact.

Abstract: According to a first aspect of the present invention there is provided a variable geometry turbine comprising: a turbine wheel mounted for rotation about a turbine axis within a housing, the housing defining an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls, the annular inlet being divided into at least two axially offset inlet portions; a cylindrical sleeve axially movable across the annular inlet to vary the size of a gas flow path through the inlet; and a guide for guiding the movement of the cylindrical sleeve, the guide being at least partially located within the inlet at a radially extent of the inlet portions, and extending in an axial direction parallel to the turbine axis.

Abstract: According to a first aspect of the present invention there is provided a variable geometry turbine comprising: a turbine wheel mounted for rotation about a turbine axis within a housing, the housing defining an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls, the annular inlet being divided into at least two axially offset inlet portions; a cylindrical sleeve axially movable across the annular inlet to vary the size of a gas flow path through the inlet; and a guide for guiding the movement of the cylindrical sleeve, the guide being at least partially located within the inlet at a radially extent of the inlet portions, and extending in an axial direction parallel to the turbine axis.

Abstract: A variable geometry turbine comprising a turbine wheel mounted for rotation about a turbine axis within a housing. The housing defines an annular inlet surrounding the turbine wheel and defined between first and second inlet sidewalls. The turbine further comprises a cylindrical sleeve that is axially movable across the annular inlet to vary the size of a gas flow path through the inlet. The annular inlet is divided into at least two axially offset inlet passages. The inner diameter of the sleeve is greater than the inner diameter of the inlet passages.