Patents by Inventor Arunima Deya BALAN

Arunima Deya BALAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SELECTIVE ETCH USING DEPOSITION OF A METALLOID OR METAL CONTAINING HARDMASK
    Publication number: 20230118701
    Abstract: A method for selectively etching at least one feature in a silicon oxide region with respect to a lower oxygen containing region is provided. An etch gas comprising a metalloid or metal containing precursor and a halogen containing component is provided. The etch gas is formed into a plasma. At least one feature in the silicon oxide region is selectively etched with respect to the lower oxygen containing region, while simultaneously forming a metalloid or metal containing hardmask over the lower oxygen containing region.
    Type: Application
    Filed: April 6, 2021
    Publication date: April 20, 2023
    Inventors: Samantha SiamHwa TAN, Daniel PETER, Arunima Deya BALAN, Younghee LEE, Yang PAN