Patents by Inventor Arunthathi Sivasothy

Arunthathi Sivasothy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vapor deposition system using benzotriazole (BTA) and isopropyl alcohol for protecting copper interconnects
    Patent number: 7550046
    Abstract: A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: June 23, 2009
    Assignee: Texas Instruments Incorporated
    Inventors: ChangFeng F. Xia, Arunthathi Sivasothy, Ricky A. Jackson, Asad M. Hauder
  • Vapor deposition of benzotriazole (BTA) for protecting copper interconnects
    Publication number: 20080047490
    Abstract: A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.
    Type: Application
    Filed: September 17, 2007
    Publication date: February 28, 2008
    Inventors: ChangFeng Xia, Arunthathi Sivasothy, Ricky Jackson, Asad Haider
  • Vapor deposition of benzotriazole (BTA) for protecting copper interconnects
    Patent number: 7144802
    Abstract: A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.
    Type: Grant
    Filed: April 1, 2003
    Date of Patent: December 5, 2006
    Assignee: Texas Instruments Incorporated
    Inventors: ChangFeng F. Xia, Arunthathi Sivasothy, Ricky A. Jackson, Asad M. Haider
  • Vapor deposition of benzotriazole (BTA) for protecting copper interconnects
    Publication number: 20060270233
    Abstract: A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.
    Type: Application
    Filed: July 24, 2006
    Publication date: November 30, 2006
    Inventors: ChangFeng Xia, Arunthathi Sivasothy, Ricky Jackson, Asad Hauder
  • Vapor deposition of benzotriazole (BTA) for protecting copper interconnects
    Publication number: 20040197958
    Abstract: A method of protecting an interconnect is provided. The method includes forming an integrated circuit structure having an interconnect, and depositing vaporized benzotriazole on the interconnect.
    Type: Application
    Filed: April 1, 2003
    Publication date: October 7, 2004
    Inventors: ChangFeng F. Xia, Arunthathi Sivasothy, Ricky A. Jackson, Asad M. Haider